9.1 ChamberFunctionClassification
| Name | Value | Description |
| Cooling | 0 | Cooling |
| Heating | 1 | Heating |
| Processing | 2 | Processing |
| Tempering | 3 | Tempering |
OPC Unified Architecture for DEXPI
OPC Unified Architecture for DEXPI
| Name | Value | Description |
| Cooling | 0 | Cooling |
| Heating | 1 | Heating |
| Processing | 2 | Processing |
| Tempering | 3 | Tempering |