2 Normative references

The following documents are referred to in the text in such a way that some or all of their content constitutes requirements of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments and errata) applies

There are no normative references in this document.

OPC 10000-1, OPC Unified Architecture - Part 1: Overview and Concepts

OPC 10000-1

OPC 10000-2, OPC Unified Architecture - Part 2: Security Model

OPC 10000-2

OPC 10000-3, OPC Unified Architecture - Part 3: Address Space Model

OPC 10000-3

OPC 10000-4, OPC Unified Architecture - Part 4: Services

OPC 10000-4

OPC 10000-5, OPC Unified Architecture - Part 5: Information Model

OPC 10000-5

OPC 10000-6, OPC Unified Architecture - Part 6: Mappings

OPC 10000-6

OPC 10000-7, OPC Unified Architecture - Part 7: Profiles

OPC 10000-7

OPC 10000-8, OPC Unified Architecture - Part 8: Data Access

OPC 10000-8

OPC 10000-100, OPC Unified Architecture - Part 100: Devices

OPC 10000-100

OPC 40001-1, OPC UA for Machinery - Part 1: Basic Building Blocks

http://www.opcfoundation.org/UA/Machinery/

OPC 40010-1, OPC UA for Robotics - Part 1: Vertical Integration

http://www.opcfoundation.org/UA/Robotics/

SEMI E10-0312: SEMI E10 Standard: Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization).

https://store-us.semi.org/products/e01000-semi-e10-specification-for-definition-and-measurement-of-equipment-reliability-availability-and-maintainability-ram-and-utilization