7 OPC UA ObjectTypes

Figure 7 shows all ObjectTypes which are defined by this companion specification.

The parent ObjectType of a general machine for surface treatment using plasma is the PlasmaSurfaceMachineType ObjectType. This ObjectType is divided into the SubTypes LowPressurePlasmaSurfaceMachineType and AtmosphericPressurePlasmaSurfaceMachineType.

This Companion Specification has also defined a separate ObjectType for each system component. These are the ObjectTypes PlasmaGeneratorType, PrecursorSystemType, GasSystemType, PlantCoolingSystemType, ProcessingChamberType, HeatingSystemType, WorkpieceMotionDeviceType and PlasmaJetType.

7.1 PlasmaSurfaceMachineType ObjectType Definition

The PlasmaSurfaceMachineType ObjectType defines the representation of a plasma surface treatment machine. The PlasmaSurfaceMachineType represents the SuperType of the LowPressurePlasmaSurfaceMachineType and the AtmosphericPressurePlasmaSurfaceMachineType, as shown in Figure 8.

Figure 9 shows the hierarchical structure with some details of this ObjectType. The PlasmaSurfaceMachineType is formally defined in Table 15.

Identification is used as defined in OPC 40001-1 and shall also be referenced as AddIn in the

MachineryBuildingBlocks Folder.

Components is representing a collection of all physical components of the plasma surface treatment machine.

Monitoring is representing a collection of the variables that are not assigned to a component but to the overall plasma surface treatment machine.

MachineryOperationCounter is used as defined in OPC 40001-1. In the information model for plasma surface machines, all counters that are implemented according to the MachineryOperationCounterType of the OPC 40001-1 shall be integrated with the HasComponent reference under this Object. This Object shall also be referenced as AddIn in the MachineryBuildingBlocks Folder.

MachineryLifetimeCounter is used as defined in OPC 40001-1. In the information model for plasma surface machines, all counters that are implemented according to the MachineryLifetimeCounterType of the OPC 40001-1 shall be integrated with the HasComponent reference under this Object. This Object shall also be referenced as AddIn in the MachineryBuildingBlocks Folder.

JobManagement is used as defined in OPC 40001-3 and shall also be referenced as AddIn in the MachineryBuildingBlocks Folder.

MachineryBuildingBlocks is representing a folder that directly references all those building blocks of the OPC UA for Machinery (OPC 40001-1, OPC 40001-3) which are implemented as an add-in in the PlasmaSurfaceMachineType or it’s subtypes.

The components of the PlasmaSurfaceMachineType have additional references which are defined in Table 16.

The components of the PlasmaSurfaceMachineType have additional subcomponents which are defined in Table 17.

PlasmaGenerator is representing the plasma power supply of the plasma surface treatment machine.

PrecursorSystem is representing the precursor system of the plasma surface treatment machine.

GasSystem is representing the gas supply system of the plasma surface treatment machine.

PlantCoolingSystem is representing the cooling system of the plasma surface treatment machine.

MainSwitchOn is representing the power on status of the plasma surface treatment machine. True means the machine is powered.

PowerConsumption is representing the total power consumption of the plasma surface treatment machine including all its components.

SubstrateTemperature is representing the current temperature of the substrate. The substrate is the workpiece to be plasma treated.

NOTE regarding MachineryOperationMode: The working group for plasma surface treatment machines has agreed that a state transition between the "Maintenance" and "Processing" states does not exist for the plasma surface treatment machines. It is therefore not permitted to execute the TransisionType FromMaintenanceToProcessing and FromProcessingToMaintenance of OPC 40001-1.

7.2 LowPressurePlasmaSurfaceMachineType ObjectType Definition

7.2.1 Overview

The LowPressurePlasmaSurfaceMachineType ObjectType is the representation of a plasma surface treatment machine that performs surface treatment at low pressure. The LowPressurePlasmaSurfaceMachineType is a SubType of the PlasmaSurfaceMachineType. This implies that all nodes of the PlasmaSurfaceMachineType are inherited by the LowPressurePlasmaSurfaceMachineType. The LowPressurePlasmaSurfaceMachineType is formally defined in Table 18.

The components of the LowPressurePlasmaSurfaceMachineType have additional subcomponents which are defined in Table 19.

ProcessingChamber is representing the processing chamber of the plasma surface treatment machine.

HeatingSystem is representing the heating system of the plasma surface treatment machine.

WorkpieceMotionDevice is representing the device that is moving the workpiece inside of the processing chamber.

NOTE: The LowPressurePlasmaSurfaceMachineType is a subtype of the PlasmaSurfacemachineType. The additional subcomponents mentioned above are referring to the mandatory Components of the PlasmaSurfacemachineType which is inherited to the LowPressurePlasmaSurfacemachineType.

7.2.2 Extension of MachineryItemState for low pressure plasma surface treatment machines

For this specification the MachineryItemState defined in OPC UA for Machinery is extended by a SubStateMachine for the State NotExecuting. An exemplary illustration can be found in Figure 10.

For this, the LowPressurePlasmaMachineryItemState_StateMachineType is defined in Table 20.

The State NotExecuting is overriden in the LowPressurePlasmaMachineryItemState_StateMachineType to get the additional reference defined in Table 21.

7.2.3 LowPressurePlasmaNotExecutingSubState_StateMachineType ObjectType Definition

The LowPressurePlasmaNotExecutingSubState_StateMachineType is used for a SubStateMachine which divides the NotExecuting State into Vented and Standby. This SubStateMachine is not active if the parent State Executing is not active. In this case the CurrentState and LastTransition Variables of the LowPressurePlasmaNotExecutingSubState state machine shall have a status equal to Bad_StateNotActive.

The LowPressurePlasmaNotExecutingSubState_StateMachineType is formally defined in Table 22.

The InstanceDeclaration of the LowPressurePlasmaNotExecutingSubState_StateMachineType has additional Attributes defined in Table 23.

The components of the LowPressurePlasmaNotExecutingSubState_StateMachineType have additional references which are defined in Table 24.

7.3 AtmosphericPressurePlasmaSurfaceMachineType ObjectType Definition

7.3.1 Overview

The AtmosphericPressurePlasmaSurfaceMachineType ObjectType is the representation of a plasma surface treatment machine that performs surface treatment at atmospheric pressure. The AtmosphericPressurePlasmaSurfaceMachineType is a SubType of the PlasmaSurfaceMachineType. This implies that all nodes of the PlasmaSurfaceMachineType are inherited by the AtmosphericPressurePlasmaSurfaceMachineType. The AtmosphericPressurePlasmaSurfaceMachineType is formally defined in Table 25.

The components of the AtmosphericPressurePlasmaSurfaceMachineType have additional subcomponents which are defined in Table 26.

PlasmaJet is representing the unit that generates the plasma required for the process.

NOTE: The LowPressurePlasmaSurfaceMachineType is a subtype of the PlasmaSurfacemachineType. The additional subcomponents mentioned above are refering to the mandatory Components of the PlasmaSurfacemachineType which is inherited to the LowPressurePlasmaSurfacemachineType.

7.3.2 Extension of MachineryItemState for atmospheric pressure plasma surface treatment machines

For this specification the MachineryItemState defined in OPC UA for Machinery is extended by a SubStateMachine for the State NotExecuting. An exemplary illustration can be found in Figure 11.

For this, the AtmosphericPressurePlasmaMachineryItemState_StateMachineType is defined Table 27.

The State NotExecuting is overriden in the AtmosphericPressurePlasmaMachineryItemState_StateMachineType to get the additional reference defined in Table 28.

7.3.3 AtmosphericPressurePlasmaNotExecutingSubState_StateMachineType ObjectType Definition

The AtmosphericPressurePlasmaNotExecutingSubState_StateMachineType is used for a SubStateMachine which divides the NotExecuting State into Idle and Standby. This SubStateMachine is not active if the parent State Executing is not active. In this case the CurrentState and LastTransition Variables of the AtmosphericPressurePlasmaNotExecutingSubState state machine shall have a status equal to Bad_StateNotActive.

The AtmosphericPressurePlasmaNotExecutingSubState_StateMachineType is formally defined in Table 29.

The InstanceDeclaration of the AtmosphericPressurePlasmaNotExecutingSubState_StateMachineType has additional Attributes defined in Table 30.

The components of the AtmosphericPressurePlasmaNotExecutingSubState_StateMachineType have additional references which are defined in Table 31.

7.4 PlasmaGeneratorType ObjectType Definition

The PlasmaGeneratorType provides all relevant Variables and parameters for monitoring a plasma generator of a plasma surface treatment machine. An overview of the information model is shown in Figure 12.

The PlasmaGeneratorType is formally defined in Table 32.

Identification is used as defined in OPC 40001-1 and shall also be referenced as AddIn in the MachineryBuildingBlocks Folder.

Monitoring is representing a collection of the variables that are assigned to this specific component.

MachineryBuildingBlocks is representing a folder that directly references all those building blocks of the OPC UA for Machinery (OPC 40001-1, OPC 40001-3) which are implemented as an add-in in this specific component.

The components of the PlasmaGeneratorType have additional references which are defined in Table 33.

The components of the PlasmaGeneratorType have additional subcomponents which are defined in Table 34.

EvaporatorCurrent is representing the present current of the evaporator.

EvaporatorVoltage is representing the present voltage of the evaporator.

EvaporatorPower is representing the present power of the evaporator.

BiasCurrent is representing the present current of the bias.

BiasVoltage is representing the present voltage of the bias.

BiasPower is representing the present power of the bias.

BiasGeneratorSwitchOn is indicating the power on status of the bias generator. True means the generator is switched on.

BiasArcCounter is counting the amount of arc events during the process.

EvaporatorGeneratorSwitchOn is indicating the power on status of the evaporator generator. True means the generator is switched on.

PlasmaReadyToStart is indicating if the plasma can be switched on. True means the plasma can be switched on.

PlasmaActive is indicating if the plasma is working.

BiasPulseFrequency is representing the output frequency of the bias generator.

BiasDutyCycle is a descriptive property of BiasPulseFrequency. It is representing the pulse ontime in percent.

BiasPolarity is a descriptive property of BiasPulseFrequency. It is indicating what polarity the BiasPulseFrequence has.

EvaporatorPulseFrequency is representing the output frequency of the evaporator generator.

EvaporatorDutyCycle is a descriptive property of EvaporatorPulseFrequency. It is representing the pulse ontime in percent.

EvaporatorPolarity is a descriptive property of EvaporatorPulseFrequency. It is indicating what polarity the EvaporatorPulseFrequencehas.

BiasReversePower is representing the power which flows back into the generator. It is also known by the name “reflected power”.

EvaporatorReversePower is representing the power which flows back into the generator. It is also known by the name “reflected power”.

7.5 PrecursorSystemType ObjectType Definition

The PrecursorSystemType provides all relevant Variables and parameters for monitoring a precursor system of a plasma surface treatment machine. An overview of the information model is shown in Figure 13.

The PrecursorSystemType is formally defined in Table 35.

Identification is used as defined in OPC 40001-1 and shall also be referenced as AddIn in the MachineryBuildingBlocks Folder.

Components is representing a collection of all physical components of the precursor system of a plasma surface treatment machine.

Monitoring is representing a collection of the variables that are assigned to this specific component.

MachineryBuildingBlocks is representing a folder that directly references all those building blocks of the OPC UA for Machinery (OPC 40001-1, OPC 40001-3) which are implemented as an add-in in this specific component.

The components of the PrecursorSystemType have additional references which are defined in Table 36.

The components of the PrecursorSystemType have additional subcomponents which are defined in Table 37.

PrimaryPressureControl is representing the prepressure of the precursor system.

PrecursorRegulator is representing an instance of a single precursor regulator of the gas system.

7.6 GasSystemType ObjectType Definition

The GasSystemType provides all relevant Variables and parameters for monitoring a gas supply system of a plasma surface treatment machine. An overview of the information model is shown in Figure 14.

The GasSystemType is formally defined in Table 38.

Identification is used as defined in OPC 40001-1. Shall also be referenced as AddIn in the MachineryBuildingBlocks Folder.

Components is representing a collection of all physical components of the gas system of a plasma surface treatment machine.

Monitoring is representing a collection of the variables that are assigned to this specific component.

MachineryBuildingBlocks is representing a folder that directly references all those building blocks of the OPC UA for Machinery (OPC 40001-1, OPC 40001-3) which are implemented as an add-in in this specific component.

The components of the GasSystemType have additional references which are defined in Table 39.

The components of the GasSystemType have additional subcomponents which are defined in Table 40.

PrimaryPressureControl is representing the prepressure of the gas system.

GasRegulator is representing an instance of a single gas regulator of the gas system.

7.7 RegulatorType ObjectType Definition

The RegulatorType provides a representation of a single gas or precursor regulator that is controlling the gas or precursor flow. An overview of the information model is shown in Figure 15.

The RegulatorType is formally defined in Table 41.

GasType is representing the type of gas used.

CorrectionFactor is representing the correction factor of the used gas. As the gas regulator is calibrated to a specific gas, correction factors are required when using other gases. The CorrectionFactor is representing this factor for the gas used.

GasFlow is representing the flow of the gas through the gas system.

GasConsumption is representing the total gas consumption of the gas regulator.

TypeOfPrecursorFluid is indicating which type of precursor gas is used in the precursor system.

PrecursorMassFlow is representing the mass flow of the precursant gas through the precursor system.

PrecursorVolumeFlow is representing the volume flow of the precursant gas through the precursor system.

TFittingTemperature is representing the current temperature at the T-Fitting of the precursor system.

HeaterTemperature is representing the current temperature of the heater of the precursor system.

JetHeadTemperature is representing the current temperature of the jet head of the precursor system.

The component Variables of the RegulatorType have additional Attributes defined in Table 42.

7.8 PlantCoolingSystemType ObjectType Definition

7.8.1 Overview

The PlantCoolingSystemType provides all relevant Variables and parameters for monitoring a cooling system of a plasma surface treatment machine. An overview of the information model is shown in Figure 16.

The PlantCoolingSystemType is formally defined in Table 43.

Identification is used as defined in OPC 40001-1. Shall also be referenced as AddIn in the MachineryBuildingBlocks Folder.

Components is representing a collection of all physical components of the plasma surface treatment machine.

Monitoring is representing a collection of the variables that are assigned to this specific component.

MachineryBuildingBlocks is representing a folder that directly references all those building blocks of the OPC UA for Machinery (OPC 40001-1, OPC 40001-3) which are implemented as an add-in in this specific component.

The components of the PlantCoolingSystemType have additional references which are defined in Table 44.

The components of the PlantCoolingSystemType have additional subcomponents which are defined in Table 45.

CirculationSystem is representing a single cooling circuit of the whole cooling system.

FlowRate is representing the volume flow of coolant through the whole plant cooling system.

CoolingSystemTemperatureOutlet is representing the temperature of the coolant at the outlet of the main coolant storage.

CoolingSystemTemperatureInlet is representing the temperature of the coolant at the inlet of the main coolant storage.

CoolingSystemPressureInlet is representing the pressure of the inlet of the main coolant storage.

CoolingSystemPressureOutlet is representing the pressure of the outlet of the main coolant storage.

7.8.2 CirculationSystemType ObjectType Definition

The CirculationSystemType provides a representation of a single circuit of the cooling system of a plasma surface treatment machine. An Instance of the PlantCoolingSystemType can have several Instances of the CirculationSystemsType as components. The CirculationSystemType is formally defined in Table 46.

CoolingCircuitTemperatureOutlet is representing the temperature of the coolant at the outlet of the specific cooling circuit.

CoolingCircuitFlowRate is representing the volume flow of coolant through the specific cooling circuit.

7.9 ProcessingChamberType ObjectType Definition

The ProcessingChamberType provides all relevant Variables and parameters for monitoring a processing chamber of a low pressure plasma surface treatment machine. An overview of the information model is shown in Figure 17.

The ProcessingChamberType is formally defined in Table 47.

Identification is used as defined in OPC 40001-1. Shall also be referenced as AddIn in the MachineryBuildingBlocks Folder.

Monitoring is representing a collection of the variables that are assigned to this specific component.

MachineryOperationCounter is used as defined in OPC 40001-1. In the component ProcessingChamberType all counters that are implemented according to the MachineryOperationCounterType of the OPC 40001-1 shall be integrated with the HasComponent reference under this Object. This Object shall also be referenced as AddIn in the MachineryBuildingBlocks Folder.

MachineryBuildingBlocks is representing a folder that directly references all those building blocks of the OPC UA for Machinery (OPC 40001-1, OPC 40001-3) which are implemented as an add-in in this specific component.

The components of the ProcessingChamberType have additional references which are defined in Table 48.

The components of the ProcessingChamberType have additional subcomponents which are defined in Table 49.

ChamberPrePressure is representing the current pre-pressure of the processing chamber.

ChamberPressure is representing the current pressure inside the processing chamber.

ChamberTemperature is representing the current temperature inside the processing chamber.

PumpDownTime is representing the time needed for evacuating the processing chamber. When the evacuation of the processing chamber has not yet been completed, the PumpDownTime is the time required so far. When the target pressure of the processing chamber has been reached, the PumpDownTime represents the total duration of the evacuation.

LeakRate is representing in what period of time the processing chamber loses what pressure.

7.10 HeatingSystemType ObjectType Definition

The HeatingSystemType provides all relevant Variables and parameters for monitoring a heating system of a plasma surface treatment machine. An overview of the information model is shown in Figure 18.

The HeatingSystemType is formally defined in Table 50.

Identification is used as defined in OPC 40001-1. Shall also be referenced as AddIn in the MachineryBuildingBlocks Folder.

Monitoring is representing a collection of the variables that are assigned to this specific component.

MachineryBuildingBlocks is representing a folder that directly references all those building blocks of the OPC UA for Machinery (OPC 40001-1, OPC 40001-3) which are implemented as an add-in in this specific component.

The components of the HeatingSystemType have additional references which are defined in Table 51.

The components of the HeatingSystemType have additional subcomponents which are defined in Table 52.

HeaterCurrent is representing the present current of the heater.

HeaterVoltage is representing the present voltage of the heater.

HeaterTemperature is representing the present temperature of the heater.

HeaterPower is representing the present power of the heater.

7.11 WorkpieceMotionDeviceType ObjectType Definition

The WorkpieceMotionDeviceType provides all relevant Variables and parameters for monitoring a device that moves the treated workpiece of a plasma surface treatment machine. An overview of the information model is shown in Figure 19.

The WorkpieceMotionDevice is formally defined in Table 53.

Identification is used as defined in OPC 40001-1. Shall also be referenced as AddIn in the MachineryBuildingBlocks Folder.

Monitoring is representing a collection of the variables that are assigned to this specific component.

MachineryBuildingBlocks is representing a folder that directly references all those building blocks of the OPC UA for Machinery (OPC 40001-1, OPC 40001-3) which are implemented as an add-in in this specific component.

The components of the WorkpieceMotionDevice have additional references which are defined in Table 54.

The components of the WorkpieceMotionDeviceType have additional subcomponents which are defined in Table 55.

RotationSpeed is representing the current rotational speed of the workpiece motion device.

RotationDirection is a descriptive property of RotationSpeed that is representing the current direction of the rotation of the workpiece motion device. True value corresponds to clockwise rotation.

RotationPosition is representing the current rotational position of the workpiece motion device.

ZMotion is representing the information if the motion device is active in the vertical direction. The value true means the motion device is active in the vertical direction.

ZMotionSpeed is a descriptive property of ZMotion that is representing the current speed of the motion perpendicular to rotation plane of the workpiece motion device.

ZMotionPosition is a descriptive property of ZMotion that is representing the current position perpendicular to rotation plane of the workpiece motion device.

7.12 PlasmaJetType ObjectType Definition

The PlasmaJetType provides all relevant Variables and parameters for monitoring a plasma jet of a plasma surface treatment machine. An overview of the information model is shown in Figure 20.

The PlasmaJetType is formally defined in Table 56.

Identification is used as defined in OPC 40001-1. Shall also be referenced as AddIn in the MachineryBuildingBlocks Folder.

Monitoring is representing a collection of the variables that are assigned to this specific component.

MachineryOperationCounter is used as defined in OPC 40001-1. In the component PlasmaJetType all counters that are implemented according to the MachineryOperationCounterType of the OPC 40001-1 shall be integrated with the HasComponent reference under this Object. This Object shall also be referenced as AddIn in the MachineryBuildingBlocks Folder.

MachineryLifetimeCounter is used as defined in OPC 40001-1. In the component PlasmaJetType all counters that are implemented according to the MachineryLifetimeCounterType of the OPC 40001-1 shall be integrated with the HasComponent reference under this Object. This Object shall also be referenced as AddIn in the MachineryBuildingBlocks Folder.

MachineryBuildingBlocks is representing a folder that directly references all those building blocks of the OPC UA for Machinery (OPC 40001-1, OPC 40001-3) which are implemented as an add-in in this specific component.

The components of the PlasmaJetType have additional references which are defined in Table 57.

The components of the PlasmaJetType have additional subcomponents which are defined in Table 58.

PlasmaVoltage is representing the present voltage of the plasma generator.

PlasmaCurrent is representing the present current of the plasma generator.

PlasmaJetPressure is representing the present jet pressure of the plasma jet.

PlasmaJetRotation is representing the present rotational speed of the plasma jet.

PlasmaJetFlow is representing the present ionization gas flow of the plasma jet.

PlasmaJetPower is representing the present power of the plasma jet.

PlasmaFrequency is representing the present plasma frequency of the plasma generator.

PlasmaCycleTime is representing the present plasma cycle time of the plasma generator.

TransformatorInformation is representing important information of the transformer of the plasma jet. This Variable should carry all information necessary to replace the transformer.