Processing Chamber – OPC UA for Plasma Surface Technology

OPC UA for Plasma Surface Technology

v1.0.0

1Scope
2Normative references
3Terms, definitions and conventions
4General information to Plasma Surface Technology and OPC UA
- 4.1Introduction to Plasma Surface Technology
- 4.2Introduction to OPC Unified Architecture
5Use cases
6Plasma Surface Technology Information Model overview
7OPC UA ObjectTypes
8Profiles and ConformanceUnits
- 8.1Conformance Units
- 8.2Profiles
9Namespaces
- 9.1Namespace Metadata
- 9.2Handling of OPC UA Namespaces
Annex AOPC UA for Plasma Surface Technology Namespace and mappings (Normative)
- A.1NodeSet and supplementary files for Plasma Surface Technology Information Model
- A.2Capability Identifier
Annex BOPC UA for Plasma Surface Technology modelling examples (Normative)
- B.1Instantiation of an exemplary low pressure plasma surface treatment machine
- B.2Instantiation of an exemplary atmospheric pressure plasma surface treatment machine

3.2.6 Processing Chamber

Process vessel of a low pressure plasma machine.