7.5 PrecursorSystemType ObjectType Definition
The PrecursorSystemType provides all relevant Variables and parameters for monitoring a precursor system of a plasma surface treatment machine. An overview of the information model is shown in Figure 13.
The PrecursorSystemType is formally defined in Table 35.
| Attribute | Value | ||||
| BrowseName | PrecursorSystemType | ||||
| IsAbstract | False | ||||
| References | Node Class | BrowseName | DataType | TypeDefinition | Other |
|---|---|---|---|---|---|
| Subtype of the BaseObjectType defined in OPC 10000-5 | |||||
| 0:HasAddIn | Object | 2:Identification | 4:MachineryComponentIdentificationType | O | |
| 0:HasAddIn | Object | 4:Components | 4:MachineComponentsType | M | |
| 0:HasComponent | Object | 4:Monitoring | 4:MonitoringType | M | |
| 0:HasComponent | Object | 4:MachineryBuildingBlocks | 0:FolderType | M | |
| Conformance Units | |||||
|---|---|---|---|---|---|
| PST PrecursorSystemType Basic | |||||
| PST PrecursorSystemType Advanced |
Identification is used as defined in OPC 40001-1 and shall also be referenced as AddIn in the MachineryBuildingBlocks Folder.
Components is representing a collection of all physical components of the precursor system of a plasma surface treatment machine.
Monitoring is representing a collection of the variables that are assigned to this specific component.
MachineryBuildingBlocks is representing a folder that directly references all those building blocks of the OPC UA for Machinery (OPC 40001-1, OPC 40001-3) which are implemented as an add-in in this specific component.
The components of the PrecursorSystemType have additional references which are defined in Table 36.
| SourceBrowsePath | Reference Type | Is Forward | TargetBrowsePath |
| 4:MachineryBuildingBlocks | 0:HasAddIn | True | 2:Identification |
| 4:MachineryBuildingBlocks | 0:HasAddIn | True | 4:Components |
| 4:MachineryBuildingBlocks | 0:HasAddIn | True | 4:Monitoring |
The components of the PrecursorSystemType have additional subcomponents which are defined in Table 37.
| Source Path | Reference | NodeClass | BrowseName | DataType | TypeDefinition | Others |
| 0:HasComponent | Variable | PrimaryPressureControl | 0:Double | 0:AnalogUnitType | O, RO | |
| 4:Components | 0:HasComponent | Object | <PrecursorRegulator> | RegulatorType | OP |
PrimaryPressureControl is representing the prepressure of the precursor system.
PrecursorRegulator is representing an instance of a single precursor regulator of the gas system.