OPC-40719

OPC UA for Plasma Surface Technology

DocumentOPC 40719
Release Version1.0.0
Publication Date2026-01-01
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Version History

VersionPublished
1.0.0 2026-01-01 current

Namespaces

Namespace URI Model Version
http://opcfoundation.org/UA/SurfaceTechnology/Plasma/ primary 1.0.0 Download

Supplementary Files

Licences

This document is subject to the license terms described here.

The general OPC Foundation specification license agreement also applies and can be found here.

The official version of the specification is here. The official version is considered correct if there are differences with this website.

Licences