OPC-40719

OPC UA for Plasma Surface Technology

DocumentOPC 40719
Release Version1.0.0
Publication Date2026-01-01
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Version History

VersionPublished
1.0.0 2026-01-01 current

Namespaces

Namespace URI Model Version
http://opcfoundation.org/UA/SurfaceTechnology/Plasma/ primary 1.0.0 Download

Supplementary Files

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This document is subject to the license terms described here.

The general OPC Foundation specification license agreement also applies and can be found here.

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