7.2.1 Overview
The LowPressurePlasmaSurfaceMachineType ObjectType is the representation of a plasma surface treatment machine that performs surface treatment at low pressure. The LowPressurePlasmaSurfaceMachineType is a SubType of the PlasmaSurfaceMachineType. This implies that all nodes of the PlasmaSurfaceMachineType are inherited by the LowPressurePlasmaSurfaceMachineType. The LowPressurePlasmaSurfaceMachineType is formally defined in Table 18.
| Attribute | Value | ||||
| BrowseName | LowPressurePlasmaSurfaceMachineType | ||||
| IsAbstract | False | ||||
| References | Node Class | BrowseName | DataType | TypeDefinition | Other |
|---|---|---|---|---|---|
| Subtype of the PlasmaSurfaceMachineType | |||||
| 0:HasAddIn | Object | 4:Components | 4:MachineComponentsType | M | |
| 0:HasComponent | Object | 4:Monitoring | 4:MonitoringType | M | |
| Conformance Units | |||||
|---|---|---|---|---|---|
| PST LowPressurePlasmaSurfaceMachineType Basic | |||||
| PST LowPressurePlasmaSurfaceMachineType StateMachine | |||||
| PST LowPressurePlasmaSurfaceMachineType HeatingSystem | |||||
| PST LowPressurePlasmaSurfaceMachineType WorkpieceMotionDevice | |||||
| PST LowPressurePlasmaSurfaceMachineType Advanced |
The components of the LowPressurePlasmaSurfaceMachineType have additional subcomponents which are defined in Table 19.
| Source Path | Reference | NodeClass | BrowseName | DataType | TypeDefinition | Others |
| 4:Components | 0:HasComponent | Object | <ProcessingChamber> | ProcessingChamberType | MP | |
| 4:Components | 0:HasComponent | Object | <HeatingSystem> | HeatingSystemType | OP | |
| 4:Components | 0:HasComponent | Object | <WorkpieceMotionDevice> | WorkpieceMotionDeviceType | OP | |
| 0:HasAddIn | Object | 4:MachineryItemState | LowPressurePlasmaMachineryItemState_StateMachineType | O |
ProcessingChamber is representing the processing chamber of the plasma surface treatment machine.
HeatingSystem is representing the heating system of the plasma surface treatment machine.
WorkpieceMotionDevice is representing the device that is moving the workpiece inside of the processing chamber.
NOTE: The LowPressurePlasmaSurfaceMachineType is a subtype of the PlasmaSurfacemachineType. The additional subcomponents mentioned above are referring to the mandatory Components of the PlasmaSurfacemachineType which is inherited to the LowPressurePlasmaSurfacemachineType.