7.2.3 LowPressurePlasmaNotExecutingSubState_StateMachineType ObjectType DefinitionThe LowPressurePlasmaNotExecutingSubState_StateMachineType is used for a SubStateMachine which divides the NotExecuting State into Vented and Standby . This SubStateMachine is not active if the parent State Executing is not active. In this case the CurrentState and LastTransition Variables of the LowPressurePlasmaNotExecutingSubState state machine shall have a status equal to Bad_StateNotActive.
The LowPressurePlasmaNotExecutingSubState_StateMachineType is formally defined in Table 22 .
Table 22 - LowPressurePlasmaNotExecutingSubState_StateMachineType Definition
Attribute
Value
BrowseName LowPressurePlasmaNotExecutingSubState_StateMachineType IsAbstract False
References
Node Class
BrowseName
DataType
TypeDefinition
Other
Subtype of the 0:FiniteStateMachineType defined in OPC 10000-16, i.e. inheriting the InstanceDeclarations of that Node. 0:HasProperty Variable 0:DefaultInstanceBrowseName 0:QualifiedName 0:PropertyType 0:HasComponent Object Vented 0:StateType 0:HasComponent Object Standby 0:StateType 0:HasComponent Object FromStandbyToVented 0:TransitionType 0:HasComponent Object FromVentedToStandby 0:TransitionType
The InstanceDeclaration of the LowPressurePlasmaNotExecutingSubState_StateMachineType has additional Attributes defined in Table 23 .
Table 23 - LowPressurePlasmaNotExecutingSubState_StateMachineType Attribute values for child nodes
BrowsePath
Value Attribute
Description Attribute
0:DefaultInstanceBrowseName LowPressurePlasmaNotExecutingSubState The default BrowseName for instances of the type Vented The machine is being prepared for the next run Standby The vacuum chamber is evacuated and the system is ready to start FromStandbyToVented Transition from state Standby to state Vented FromVentedToStandby Transition from state Vented to state Standby
0
1 FromStandbyToVented 0:TransitionNumber
0 FromVentedToStandby 0:TransitionNumber
1
The components of the LowPressurePlasmaNotExecutingSubState_StateMachineType have additional references which are defined in Table 24 .
Table 24 - LowPressurePlasmaNotExecutingSubState_StateMachineType Additional References
SourceBrowsePath
Reference Type
Is Forward
TargetBrowsePath
FromStandbyToVented 0:FromState True Standby 0:ToState True Vented FromVentedToStandby 0:FromState True Vented 0:ToState True Standby
