7.2.3 LowPressurePlasmaNotExecutingSubState_StateMachineType ObjectType Definition
The LowPressurePlasmaNotExecutingSubState_StateMachineType is used for a SubStateMachine which divides the NotExecuting State into Vented and Standby. This SubStateMachine is not active if the parent State Executing is not active. In this case the CurrentState and LastTransition Variables of the LowPressurePlasmaNotExecutingSubState state machine shall have a status equal to Bad_StateNotActive.
The LowPressurePlasmaNotExecutingSubState_StateMachineType is formally defined in Table 22.
| Attribute | Value | ||||
| BrowseName | LowPressurePlasmaNotExecutingSubState_StateMachineType | ||||
| IsAbstract | False | ||||
| References | Node Class | BrowseName | DataType | TypeDefinition | Other |
|---|---|---|---|---|---|
| Subtype of the 0:FiniteStateMachineType defined in OPC 10000-16, i.e. inheriting the InstanceDeclarations of that Node. | |||||
| 0:HasProperty | Variable | 0:DefaultInstanceBrowseName | 0:QualifiedName | 0:PropertyType | |
| 0:HasComponent | Object | Vented | 0:StateType | ||
| 0:HasComponent | Object | Standby | 0:StateType | ||
| 0:HasComponent | Object | FromStandbyToVented | 0:TransitionType | ||
| 0:HasComponent | Object | FromVentedToStandby | 0:TransitionType | ||
The InstanceDeclaration of the LowPressurePlasmaNotExecutingSubState_StateMachineType has additional Attributes defined in Table 23.
| BrowsePath | Value Attribute | Description Attribute |
| 0:DefaultInstanceBrowseName | LowPressurePlasmaNotExecutingSubState | The default BrowseName for instances of the type |
| Vented | The machine is being prepared for the next run | |
| Standby | The vacuum chamber is evacuated and the system is ready to start | |
| FromStandbyToVented | Transition from state Standby to state Vented | |
| FromVentedToStandby | Transition from state Vented to state Standby | |
| 0 | ||
| 1 | ||
| 0 | ||
| 1 |
The components of the LowPressurePlasmaNotExecutingSubState_StateMachineType have additional references which are defined in Table 24.
| SourceBrowsePath | Reference Type | Is Forward | TargetBrowsePath |
| FromStandbyToVented | 0:FromState | True | Standby |
| 0:ToState | True | Vented | |
| FromVentedToStandby | 0:FromState | True | Vented |
| 0:ToState | True | Standby |