7.2 LowPressurePlasmaSurfaceMachineType ObjectType Definition

7.2.1 Overview

The LowPressurePlasmaSurfaceMachineType ObjectType is the representation of a plasma surface treatment machine that performs surface treatment at low pressure. The LowPressurePlasmaSurfaceMachineType is a SubType of the PlasmaSurfaceMachineType. This implies that all nodes of the PlasmaSurfaceMachineType are inherited by the LowPressurePlasmaSurfaceMachineType. The LowPressurePlasmaSurfaceMachineType is formally defined in Table 18.

The components of the LowPressurePlasmaSurfaceMachineType have additional subcomponents which are defined in Table 19.

ProcessingChamber is representing the processing chamber of the plasma surface treatment machine.

HeatingSystem is representing the heating system of the plasma surface treatment machine.

WorkpieceMotionDevice is representing the device that is moving the workpiece inside of the processing chamber.

NOTE: The LowPressurePlasmaSurfaceMachineType is a subtype of the PlasmaSurfacemachineType. The additional subcomponents mentioned above are referring to the mandatory Components of the PlasmaSurfacemachineType which is inherited to the LowPressurePlasmaSurfacemachineType.

7.2.2 Extension of MachineryItemState for low pressure plasma surface treatment machines

For this specification the MachineryItemState defined in OPC UA for Machinery is extended by a SubStateMachine for the State NotExecuting. An exemplary illustration can be found in Figure 10.

For this, the LowPressurePlasmaMachineryItemState_StateMachineType is defined in Table 20.

The State NotExecuting is overriden in the LowPressurePlasmaMachineryItemState_StateMachineType to get the additional reference defined in Table 21.

7.2.3 LowPressurePlasmaNotExecutingSubState_StateMachineType ObjectType Definition

The LowPressurePlasmaNotExecutingSubState_StateMachineType is used for a SubStateMachine which divides the NotExecuting State into Vented and Standby. This SubStateMachine is not active if the parent State Executing is not active. In this case the CurrentState and LastTransition Variables of the LowPressurePlasmaNotExecutingSubState state machine shall have a status equal to Bad_StateNotActive.

The LowPressurePlasmaNotExecutingSubState_StateMachineType is formally defined in Table 22.

The InstanceDeclaration of the LowPressurePlasmaNotExecutingSubState_StateMachineType has additional Attributes defined in Table 23.

The components of the LowPressurePlasmaNotExecutingSubState_StateMachineType have additional references which are defined in Table 24.