8.2.2.4 PST Low Pressure Facet

This Facet defines support of Low Pressure Plasma Surface Technology functionality. At least one of the optional Conformance Units has to be implemented.

Table 63 – PST Low Pressure Facet
Group Conformance Unit/ Profile Title M / O
PlasmaSurfaceTechnologyPST LowPressurePlasmaSurfaceMachineType BasicM
PlasmaSurfaceTechnologyPST LowPressurePlasmaSurfaceMachineType StateMachineO
PlasmaSurfaceTechnologyPST LowPressurePlasmaSurfaceMachineType HeatingSystemO
PlasmaSurfaceTechnologyPST LowPressurePlasmaSurfaceMachineType WorkpieceMotionDeviceO
PlasmaSurfaceTechnologyPST LowPressurePlasmaSurfaceMachineType AdvancedO