8.2.2.3 PST Advanced Server Facet

This Facet defines support for advanced Plasma Surface Technology functionality. At least five of the optional Conformance Units must be implemented.

Table 62 – PST Advanced Server Facet
Group Conformance Unit/ Profile Title M / O
PlasmaSurfaceTechnologyPST PlasmaSurfaceMachineType BasicM
PlasmaSurfaceTechnologyPST PlasmaGeneratorType AdvancedO
PlasmaSurfaceTechnologyPST PrecursorSystemType AdvancedO
PlasmaSurfaceTechnologyPST GasSystemType AdvancedO
PlasmaSurfaceTechnologyPST PlantCoolingSystemType AdvancedO
PlasmaSurfaceTechnologyPST ProcessingChamberType AdvancedO
PlasmaSurfaceTechnologyPST HeatingSystemType AdvancedO
PlasmaSurfaceTechnologyPST WorkpieceMotionDeviceType AdvancedO
PlasmaSurfaceTechnologyPST PlasmaJetType AdvancedO
PlasmaSurfaceTechnologyPST PlasmaSurfaceMachineType OperationModeO
PlasmaSurfaceTechnologyPST PlasmaSurfaceMachineType JobManagementO