8.2.2.2 PST Basic Server Facet

This Facet defines support for base Plasma Surface Technology functionality. At least five of the optional Conformance Units must be implemented.

Table 61 – PST Basic Server Facet
Group Conformance Unit/ Profile Title M / O
PlasmaSurfaceTechnologyPST PlasmaSurfaceMachineType BasicM
PlasmaSurfaceTechnologyPST PlasmaGeneratorType BasicO
PlasmaSurfaceTechnologyPST PrecursorSystemType BasicO
PlasmaSurfaceTechnologyPST GasSystemType BasicO
PlasmaSurfaceTechnologyPST PlantCoolingSystemType BasicO
PlasmaSurfaceTechnologyPST ProcessingChamberType BasicO
PlasmaSurfaceTechnologyPST HeatingSystemType BasicO
PlasmaSurfaceTechnologyPST WorkpieceMotionDeviceType BasicO
PlasmaSurfaceTechnologyPST PlasmaJetType BasicO