8.2 Profiles

8.2.1 Profile list

Table 60 lists all Profiles defined in this document and defines their URIs.

Table 60 – Profile URIs for OPC UA for Plasma Surface Technology
Profile URI
PST Basic Server Facethttp://opcfoundation.org/UA-Facet/PlasmaSurfaceTechnology/Server/PSTBasicServer
PST Advanced Server Facethttp://opcfoundation.org/UA-Facet/PlasmaSurfaceTechnology/Server/PSTAdvancedServer
PST Low Pressure Facethttp://opcfoundation.org/UA-Facet/PlasmaSurfaceTechnology/Server/PSTLowPressure
PST Atmospheric Pressure Facethttp://opcfoundation.org/UA-Facet/PlasmaSurfaceTechnology/Server/PSTAtmosphericPressure

8.2.2 Server Facets

8.2.2.1 Overview

The following sections specify the Facets available for Servers that implement the Plasma Surface Technology companion specification. Each section defines and describes a Facet or Profile.

8.2.2.2 PST Basic Server Facet

This Facet defines support for base Plasma Surface Technology functionality. At least five of the optional Conformance Units must be implemented.

Table 61 – PST Basic Server Facet
Group Conformance Unit/ Profile Title M / O
PlasmaSurfaceTechnologyPST PlasmaSurfaceMachineType BasicM
PlasmaSurfaceTechnologyPST PlasmaGeneratorType BasicO
PlasmaSurfaceTechnologyPST PrecursorSystemType BasicO
PlasmaSurfaceTechnologyPST GasSystemType BasicO
PlasmaSurfaceTechnologyPST PlantCoolingSystemType BasicO
PlasmaSurfaceTechnologyPST ProcessingChamberType BasicO
PlasmaSurfaceTechnologyPST HeatingSystemType BasicO
PlasmaSurfaceTechnologyPST WorkpieceMotionDeviceType BasicO
PlasmaSurfaceTechnologyPST PlasmaJetType BasicO
8.2.2.3 PST Advanced Server Facet

This Facet defines support for advanced Plasma Surface Technology functionality. At least five of the optional Conformance Units must be implemented.

Table 62 – PST Advanced Server Facet
Group Conformance Unit/ Profile Title M / O
PlasmaSurfaceTechnologyPST PlasmaSurfaceMachineType BasicM
PlasmaSurfaceTechnologyPST PlasmaGeneratorType AdvancedO
PlasmaSurfaceTechnologyPST PrecursorSystemType AdvancedO
PlasmaSurfaceTechnologyPST GasSystemType AdvancedO
PlasmaSurfaceTechnologyPST PlantCoolingSystemType AdvancedO
PlasmaSurfaceTechnologyPST ProcessingChamberType AdvancedO
PlasmaSurfaceTechnologyPST HeatingSystemType AdvancedO
PlasmaSurfaceTechnologyPST WorkpieceMotionDeviceType AdvancedO
PlasmaSurfaceTechnologyPST PlasmaJetType AdvancedO
PlasmaSurfaceTechnologyPST PlasmaSurfaceMachineType OperationModeO
PlasmaSurfaceTechnologyPST PlasmaSurfaceMachineType JobManagementO
8.2.2.4 PST Low Pressure Facet

This Facet defines support of Low Pressure Plasma Surface Technology functionality. At least one of the optional Conformance Units has to be implemented.

Table 63 – PST Low Pressure Facet
Group Conformance Unit/ Profile Title M / O
PlasmaSurfaceTechnologyPST LowPressurePlasmaSurfaceMachineType BasicM
PlasmaSurfaceTechnologyPST LowPressurePlasmaSurfaceMachineType StateMachineO
PlasmaSurfaceTechnologyPST LowPressurePlasmaSurfaceMachineType HeatingSystemO
PlasmaSurfaceTechnologyPST LowPressurePlasmaSurfaceMachineType WorkpieceMotionDeviceO
PlasmaSurfaceTechnologyPST LowPressurePlasmaSurfaceMachineType AdvancedO
8.2.2.5 PST Atmospheric Pressure Facet

This Facet defines support of Atmospheric Pressure Plasma Surface Technology functionality. At least one of the optional Conformance Units must be implemented.

Table 64 – PST Atmospheric Pressure Facet
Group Conformance Unit/ Profile Title M / O
PlasmaSurfaceTechnologyPST AtmosphericPressurePlasmaSurfaceMachineType BasicM
PlasmaSurfaceTechnologyPST AtmosphericPressurePlasmaSurfaceMachineType StateMachineO
PlasmaSurfaceTechnologyPST AtmosphericPressurePlasmaSurfaceMachineType AdvancedO

8.2.3 Client Facets

This specification does not define any Client Facets.