Conformance Units – OPC UA for Plasma Surface Technology

8.1 Conformance Units

This chapter defines the corresponding Conformance Units for the OPC UA Information Model for Plasma Surface Technology.

Table 59 – Conformance Units for OPC UA for Plasma Surface Technology

Category	Title	Description
Server	PST PlasmaSurfaceMachineType Basic	Type definition of PlasmaSurfaceMachineType is available on the server. There is at least one instance of PlasmaSurfaceMachineType. The instance has all mandatory nodes.
Server	PST PlasmaSurfaceMachineType JobManagement	The PlasmaSurfaceMachineType instance has the optional node of JobManagement.
Server	PST PlasmaSurfaceMachineType OperationMode	The PlasmaSurfaceMachineType instance has the optional node for OperationMode.
Server	PST LowPressurePlasmaSurfaceMachineType Basic	Type definition of LowPressurePlasmaSurfaceMachineType is available on the server. There is at least one instance of LowPressurePlasmaSurfaceMachineType. The instance has all mandatory nodes.
Server	PST LowPressurePlasmaSurfaceMachineType StateMachine	The LowPressurePlasmaSurfaceMachineType instance has the optional node of LowPressurePlasmaMachineryItemState_StateMachineType.
Server	PST LowPressurePlasmaSurfaceMachineType HeatingSystem	The LowPressurePlasmaSurfaceMachineType instance has at least one instance of the optional component from the HeatingSystemType.
Server	PST LowPressurePlasmaSurfaceMachineType WorkpieceMotionDevice	The LowPressurePlasmaSurfaceMachineType instance has at least one instance of the optional component from the WorkpieceMotionDeviceType.
Server	PST LowPressurePlasmaSurfaceMachineType Advanced	There is at least one instance of LowPressurePlasmaSurfaceMachineType. The instance has all mandatory and optional nodes.
Server	PST AtmosphericPressurePlasmaSurfaceMachineType Basic	Type definition of AtmosphericPressurePlasmaSurfaceMachineType is available on the server. There is at least one instance of AtmosphericPressurePlasmaSurfaceMachineType. The instance has all mandatory nodes.
Server	PST AtmosphericPressurePlasmaSurfaceMachineType StateMachine	The AtmosphericPressurePlasmaSurfaceMachineType instance has the optional node of AtmosphericPressurePlasmaMachineryItemState_StateMachineType.
Server	PST AtmosphericPressurePlasmaSurfaceMachineType Advanced	There is at least one instance of AtmosphericPressurePlasmaSurfaceMachineType. The instance has all mandatory and optional nodes.
Server	PST PlasmaGeneratorType Basic	Type definition of PlasmaGeneratorType is available on the server. There is at least one instance of PlasmaGeneratorType. The instance has all mandatory nodes.
Server	PST PlasmaGeneratorType Advanced	There is at least one instance of PlasmaGeneratorType. The instance has all mandatory and optional nodes.
Server	PST PrecursorSystemType Basic	Type definition of PrecursorSystemType is available on the server. There is at least one instance of PrecursorSystemType. The instance has all mandatory nodes.
Server	PST PrecursorSystemType Advanced	There is at least one instance of PrecursorSystemType. The instance has all mandatory and optional nodes.
Server	PST GasSystemType Basic	Type definition of GasSystemType is available on the server. There is at least one instance of GasSystemType. The instance has all mandatory nodes.
Server	PST GasSystemType Advanced	There is at least one instance of GasSystemType. The instance has all mandatory and optional nodes.
Server	PST PlantCoolingSystemType Basic	Type definition of PlantCoolingSystemType is available on the server. There is at least one instance of PlantCoolingSystemType. The instance has all mandatory nodes.
Server	PST PlantCoolingSystemType Advanced	There is at least one instance of PlantCoolingSystemType. The instance has all mandatory and optional nodes.
Server	PST ProcessingChamberType Basic	Type definition of ProcessingChamberType is available on the server. There is at least one instance of ProcessingChamberType. The instance has all mandatory nodes.
Server	PST ProcessingChamberType Advanced	There is at least one instance of ProcessingChamberType. The instance has all mandatory and optional nodes.
Server	PST HeatingSystemType Basic	Type definition of HeatingSystemType is available on the server. There is at least one instance of HeatingSystemType. The instance has all mandatory nodes.
Server	PST HeatingSystemType Advanced	There is at least one instance of HeatingSystemType. The instance has all mandatory and optional nodes.

Server	PST WorkpieceMotionDeviceType Basic	Type definition of WorkpieceMotionDeviceType is available on the server. There is at least one instance of WorkpieceMotionDeviceType. The instance has all mandatory nodes.
Server	PST WorkpieceMotionDeviceType Advanced	There is at least one instance of WorkpieceMotionDeviceType. The instance has all mandatory and optional nodes.
Server	PST PlasmaJetType Basic	Type definition of PlasmaJetType is available on the server. There is at least one instance of PlasmaJetType. The instance has all mandatory nodes.
Server	PST PlasmaJetType Advanced	There is at least one instance of PlasmaJetType. The instance has all mandatory and optional nodes.