12.3.2.5 GMS Tools Server Facet

Table 61 defines a Facet, that contains the information about tools (sensors) in the GMS. If the list of tools is used dynamically, the ConformanceUnits MachineTool Event Propagation and MachineTool Event Tools shall be provided.

Table 61 – GMS Tools Server Facet
GroupConformance Unit / Profile Title(M)andatory / (O)ptional
Profile5:MachineTool Tools Server FacetM
GMSGMS MultiSensorTypeM
GMSGMS SensorTypeM
MachineToolMachineTool Event ToolsO
MachineToolMachineTool Event PropagationO