Plasma Surface Technology - 8 Profiles and ConformanceUnits

This chapter defines the corresponding Conformance Units for the OPC UA Information Model for Plasma Surface Technology.

Table 59 – Conformance Units for OPC UA for Plasma Surface Technology

Category	Title	Description
Server	PST PlasmaSurfaceMachineType Basic	Type definition of PlasmaSurfaceMachineType is available on the server. There is at least one instance of PlasmaSurfaceMachineType. The instance has all mandatory nodes.
Server	PST PlasmaSurfaceMachineType JobManagement	The PlasmaSurfaceMachineType instance has the optional node of JobManagement.
Server	PST PlasmaSurfaceMachineType OperationMode	The PlasmaSurfaceMachineType instance has the optional node for OperationMode.
Server	PST LowPressurePlasmaSurfaceMachineType Basic	Type definition of LowPressurePlasmaSurfaceMachineType is available on the server. There is at least one instance of LowPressurePlasmaSurfaceMachineType. The instance has all mandatory nodes.
Server	PST LowPressurePlasmaSurfaceMachineType StateMachine	The LowPressurePlasmaSurfaceMachineType instance has the optional node of LowPressurePlasmaMachineryItemState_StateMachineType.
Server	PST LowPressurePlasmaSurfaceMachineType HeatingSystem	The LowPressurePlasmaSurfaceMachineType instance has at least one instance of the optional component from the HeatingSystemType.
Server	PST LowPressurePlasmaSurfaceMachineType WorkpieceMotionDevice	The LowPressurePlasmaSurfaceMachineType instance has at least one instance of the optional component from the WorkpieceMotionDeviceType.
Server	PST LowPressurePlasmaSurfaceMachineType Advanced	There is at least one instance of LowPressurePlasmaSurfaceMachineType. The instance has all mandatory and optional nodes.
Server	PST AtmosphericPressurePlasmaSurfaceMachineType Basic	Type definition of AtmosphericPressurePlasmaSurfaceMachineType is available on the server. There is at least one instance of AtmosphericPressurePlasmaSurfaceMachineType. The instance has all mandatory nodes.
Server	PST AtmosphericPressurePlasmaSurfaceMachineType StateMachine	The AtmosphericPressurePlasmaSurfaceMachineType instance has the optional node of AtmosphericPressurePlasmaMachineryItemState_StateMachineType.
Server	PST AtmosphericPressurePlasmaSurfaceMachineType Advanced	There is at least one instance of AtmosphericPressurePlasmaSurfaceMachineType. The instance has all mandatory and optional nodes.
Server	PST PlasmaGeneratorType Basic	Type definition of PlasmaGeneratorType is available on the server. There is at least one instance of PlasmaGeneratorType. The instance has all mandatory nodes.
Server	PST PlasmaGeneratorType Advanced	There is at least one instance of PlasmaGeneratorType. The instance has all mandatory and optional nodes.
Server	PST PrecursorSystemType Basic	Type definition of PrecursorSystemType is available on the server. There is at least one instance of PrecursorSystemType. The instance has all mandatory nodes.
Server	PST PrecursorSystemType Advanced	There is at least one instance of PrecursorSystemType. The instance has all mandatory and optional nodes.
Server	PST GasSystemType Basic	Type definition of GasSystemType is available on the server. There is at least one instance of GasSystemType. The instance has all mandatory nodes.
Server	PST GasSystemType Advanced	There is at least one instance of GasSystemType. The instance has all mandatory and optional nodes.
Server	PST PlantCoolingSystemType Basic	Type definition of PlantCoolingSystemType is available on the server. There is at least one instance of PlantCoolingSystemType. The instance has all mandatory nodes.
Server	PST PlantCoolingSystemType Advanced	There is at least one instance of PlantCoolingSystemType. The instance has all mandatory and optional nodes.
Server	PST ProcessingChamberType Basic	Type definition of ProcessingChamberType is available on the server. There is at least one instance of ProcessingChamberType. The instance has all mandatory nodes.
Server	PST ProcessingChamberType Advanced	There is at least one instance of ProcessingChamberType. The instance has all mandatory and optional nodes.
Server	PST HeatingSystemType Basic	Type definition of HeatingSystemType is available on the server. There is at least one instance of HeatingSystemType. The instance has all mandatory nodes.
Server	PST HeatingSystemType Advanced	There is at least one instance of HeatingSystemType. The instance has all mandatory and optional nodes.

Server	PST WorkpieceMotionDeviceType Basic	Type definition of WorkpieceMotionDeviceType is available on the server. There is at least one instance of WorkpieceMotionDeviceType. The instance has all mandatory nodes.
Server	PST WorkpieceMotionDeviceType Advanced	There is at least one instance of WorkpieceMotionDeviceType. The instance has all mandatory and optional nodes.
Server	PST PlasmaJetType Basic	Type definition of PlasmaJetType is available on the server. There is at least one instance of PlasmaJetType. The instance has all mandatory nodes.
Server	PST PlasmaJetType Advanced	There is at least one instance of PlasmaJetType. The instance has all mandatory and optional nodes.

8.2 Profiles

8.2.1 Profile list

Table 60 lists all Profiles defined in this document and defines their URIs.

Table 60 – Profile URIs for OPC UA for Plasma Surface Technology

Profile	URI
PST Basic Server Facet	http://opcfoundation.org/UA-Facet/PlasmaSurfaceTechnology/Server/PSTBasicServer
PST Advanced Server Facet	http://opcfoundation.org/UA-Facet/PlasmaSurfaceTechnology/Server/PSTAdvancedServer
PST Low Pressure Facet	http://opcfoundation.org/UA-Facet/PlasmaSurfaceTechnology/Server/PSTLowPressure
PST Atmospheric Pressure Facet	http://opcfoundation.org/UA-Facet/PlasmaSurfaceTechnology/Server/PSTAtmosphericPressure

8.2.2 Server Facets

8.2.2.1 Overview

The following sections specify the Facets available for Servers that implement the Plasma Surface Technology companion specification. Each section defines and describes a Facet or Profile.

8.2.2.2 PST Basic Server Facet

This Facet defines support for base Plasma Surface Technology functionality. At least five of the optional Conformance Units must be implemented.

Table 61 – PST Basic Server Facet

Group	Conformance Unit/ Profile Title	M / O
PlasmaSurfaceTechnology	PST PlasmaSurfaceMachineType Basic	M
PlasmaSurfaceTechnology	PST PlasmaGeneratorType Basic	O
PlasmaSurfaceTechnology	PST PrecursorSystemType Basic	O
PlasmaSurfaceTechnology	PST GasSystemType Basic	O
PlasmaSurfaceTechnology	PST PlantCoolingSystemType Basic	O
PlasmaSurfaceTechnology	PST ProcessingChamberType Basic	O
PlasmaSurfaceTechnology	PST HeatingSystemType Basic	O
PlasmaSurfaceTechnology	PST WorkpieceMotionDeviceType Basic	O
PlasmaSurfaceTechnology	PST PlasmaJetType Basic	O

8.2.2.3 PST Advanced Server Facet

This Facet defines support for advanced Plasma Surface Technology functionality. At least five of the optional Conformance Units must be implemented.

Table 62 – PST Advanced Server Facet

Group	Conformance Unit/ Profile Title	M / O
PlasmaSurfaceTechnology	PST PlasmaSurfaceMachineType Basic	M
PlasmaSurfaceTechnology	PST PlasmaGeneratorType Advanced	O
PlasmaSurfaceTechnology	PST PrecursorSystemType Advanced	O
PlasmaSurfaceTechnology	PST GasSystemType Advanced	O
PlasmaSurfaceTechnology	PST PlantCoolingSystemType Advanced	O
PlasmaSurfaceTechnology	PST ProcessingChamberType Advanced	O
PlasmaSurfaceTechnology	PST HeatingSystemType Advanced	O
PlasmaSurfaceTechnology	PST WorkpieceMotionDeviceType Advanced	O
PlasmaSurfaceTechnology	PST PlasmaJetType Advanced	O
PlasmaSurfaceTechnology	PST PlasmaSurfaceMachineType OperationMode	O
PlasmaSurfaceTechnology	PST PlasmaSurfaceMachineType JobManagement	O

8.2.2.4 PST Low Pressure Facet

This Facet defines support of Low Pressure Plasma Surface Technology functionality. At least one of the optional Conformance Units has to be implemented.

Table 63 – PST Low Pressure Facet

Group	Conformance Unit/ Profile Title	M / O
PlasmaSurfaceTechnology	PST LowPressurePlasmaSurfaceMachineType Basic	M
PlasmaSurfaceTechnology	PST LowPressurePlasmaSurfaceMachineType StateMachine	O
PlasmaSurfaceTechnology	PST LowPressurePlasmaSurfaceMachineType HeatingSystem	O
PlasmaSurfaceTechnology	PST LowPressurePlasmaSurfaceMachineType WorkpieceMotionDevice	O
PlasmaSurfaceTechnology	PST LowPressurePlasmaSurfaceMachineType Advanced	O

8.2.2.5 PST Atmospheric Pressure Facet

This Facet defines support of Atmospheric Pressure Plasma Surface Technology functionality. At least one of the optional Conformance Units must be implemented.

Table 64 – PST Atmospheric Pressure Facet

Group	Conformance Unit/ Profile Title	M / O
PlasmaSurfaceTechnology	PST AtmosphericPressurePlasmaSurfaceMachineType Basic	M
PlasmaSurfaceTechnology	PST AtmosphericPressurePlasmaSurfaceMachineType StateMachine	O
PlasmaSurfaceTechnology	PST AtmosphericPressurePlasmaSurfaceMachineType Advanced	O

8.2.3 Client Facets

This specification does not define any Client Facets.