10 (normative)OPC UA for Plasma Surface Technology Namespace and mappings
NodeSet and supplementary files for Plasma Surface Technology Information Model
The Plasma Surface Technology Information Model is identified by the following URI:
http://opcfoundation.org/UA/SurfaceTechnology/Plasma/
Documentation for the NamespaceUri can be found here.
The NodeSet associated with this version of specification can be found here:
The NodeSet associated with the latest version of the specification can be found here:
Supplementary files for the Plasma Surface Technology Information Model can be found here:
The files associated with the latest version of the specification can be found here:
Capability Identifier
The capability identifier for this document shall be:
STPlasma___________