3.2.1

Laser System

a self-contained system, including the laser source and all required subsystems, such as the control system for the laser source, optics, cooling aggregates and others.

3.2.2

Recipe

list of operations that the controller of a laser system performs in sequence

3.2.3

Activity Monitoring Data

Data describing activities that have been performed on a laser system, e.g., a change in a critical parameter value.

3.2.4

Condition Monitoring Data

Data used to indicate the condition of a laser system, e.g., temperature values.

3.2.5

Consumption Monitoring Data

Information on the external media consumption being consumed (e.g., power consumption, compressed air, cooling water)