3.2 OPC UA for Laser Systems terms

3.2.1 3.2.1

3.2.2 Laser System

a self-contained system, including the laser source and all required subsystems, such as the control system for the laser source, optics, cooling aggregates and others.

3.2.3 3.2.2

3.2.4 Recipe

list of operations that the controller of a laser system performs in sequence

3.2.5 3.2.3

Activity Monitoring Data

3.2.6 3.2.4

Condition Monitoring Data

3.2.7 3.2.5

Consumption Monitoring Data