| Group | Conformance Unit / Profile Title | Mandatory / Optional |
| Profile | 0:Embedded Server 2017 (defined in OPC 10000-7) | M |
| Profile | 0:ComplexType Server Facet (defined in OPC 10000-7) | M |
| Profile | 0:Standard Event Subscription Server Facet (defined in OPC 10000-7) | M |
| Profile | 0:Method Server Facet (defined in OPC 10000-7) | M |
| Profile | 2:BaseDevice Server Facet (defined in OPC 10000-100) | M |
| OPC 40082-5 | OPC 40082-5 Basic | M |
| OPC 40082-5 | OPC 40082-5 Alarms | O |
| OPC 40082-5 | OPC 40082-5 Maintenance | O |
| OPC 40082-5 | OPC 40082-5 Users | O |
| OPC 40082-5 | OPC 40082-5 Temperatures | O |
| OPC 40082-5 | OPC 40082-5 TemperatureDifferences | O |
| OPC 40082-5 | OPC 40082-5 Pressures | O |
| OPC 40082-5 | OPC 40082-5 PressureDifferences | O |
| OPC 40082-5 | OPC 40082-5 FlowRates | O |
| OPC 40082-5 | OPC 40082-5 Distances | O |
| OPC 40082-5 | OPC 40082-5 Forces | O |
| OPC 40082-5 | OPC 40082-5 AcousticValues | O |
| OPC 40082-5 | OPC 40082-5 DigitalInputs | O |
| OPC 40082-5 | OPC 40082-5 DigitalOutputs | O |
