OPC 40719: Plasma Surface Technology

Released 1.00

2025-11-01

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1 Scope 2 Normative references 3 Terms, definitions and conventions 3.1 Overview 3.2 OPC UA for Plasma Surface Technology terms 3.3 Abbreviated terms 3.4 Conventions used in this document 3.4.1 Conventions for Node descriptions 3.4.1.1 Node definitions 3.4.1.2 Additional References 3.4.1.3 Additional sub-components 3.4.1.4 Additional Attribute values 3.4.2 NodeIds and BrowseNames 3.4.2.1 NodeIds 3.4.2.2 BrowseNames 3.4.3 Common Attributes 3.4.3.1 General 3.4.3.2 Objects 3.4.3.3 Variables 3.4.3.4 VariableTypes 3.4.3.5 Methods 3.4.4 Structures 4 General information to Plasma Surface Technology and OPC UA 4.1 Introduction to Plasma Surface Technology 4.2 Introduction to OPC Unified Architecture 4.2.1 What is OPC UA? 4.2.2 Basics of OPC UA 4.2.3 Information modelling in OPC UA 4.2.3.1 Concepts 4.2.3.2 Namespaces 4.2.3.3 Companion Specifications 5 Use cases 5.1 Identify machines in a standardized way 5.2 Monitoring of the plasma surface treatment machine 5.3 Monitoring of jobs 5.4 Physical representation of the machine and its components 5.5 Harmonizing with existing standards 6 Plasma Surface Technology Information Model overview 7 OPC UA ObjectTypes 7.1 PlasmaSurfaceMachineType ObjectType Definition 7.2 LowPressurePlasmaSurfaceMachineType ObjectType Definition 7.2.1 Overview 7.2.2 Extension of MachineryItemState for low pressure plasma surface treatment machines 7.2.3 LowPressurePlasmaNotExecutingSubState_StateMachineType ObjectType Definition 7.3 AtmosphericPressurePlasmaSurfaceMachineType ObjectType Definition 7.3.1 Overview 7.3.2 Extension of MachineryItemState for atmospheric pressure plasma surface treatment machines 7.3.3 AtmosphericPressurePlasmaNotExecutingSubState_StateMachineType ObjectType Definition 7.4 PlasmaGeneratorType ObjectType Definition 7.5 PrecursorSystemType ObjectType Definition 7.6 GasSystemType ObjectType Definition 7.7 RegulatorType ObjectType Definition 7.8 PlantCoolingSystemType ObjectType Definition 7.8.1 Overview 7.8.2 CirculationSystemType ObjectType Definition 7.9 ProcessingChamberType ObjectType Definition 7.10 HeatingSystemType ObjectType Definition 7.11 WorkpieceMotionDeviceType ObjectType Definition 7.12 PlasmaJetType ObjectType Definition 8 Profiles and ConformanceUnits 8.1 Conformance Units 8.2 Profiles 8.2.1 Profile list 8.2.2 Server Facets 8.2.2.1 Overview 8.2.2.2 PST Basic Server Facet 8.2.2.3 PST Advanced Server Facet 8.2.2.4 PST Low Pressure Facet 8.2.2.5 PST Atmospheric Pressure Facet 8.2.3 Client Facets 9 Namespaces 9.1 Namespace Metadata 9.2 Handling of OPC UA Namespaces Annex A (normative)OPC UA for Plasma Surface Technology Namespace and mappings Annex B (normative)OPC UA for Plasma Surface Technology modelling examples