This Facet defines support of Low Pressure Plasma Surface Technology functionality. At least one of the optional Conformance Units has to be implemented.
Table 63 – PST Low Pressure Facet
|
Group |
Conformance Unit/ Profile Title |
M / O |
|
PlasmaSurfaceTechnology |
PST LowPressurePlasmaSurfaceMachineType Basic |
M |
|
PlasmaSurfaceTechnology |
PST LowPressurePlasmaSurfaceMachineType StateMachine |
O |
|
PlasmaSurfaceTechnology |
PST LowPressurePlasmaSurfaceMachineType HeatingSystem |
O |
|
PlasmaSurfaceTechnology |
PST LowPressurePlasmaSurfaceMachineType WorkpieceMotionDevice |
O |
|
PlasmaSurfaceTechnology |
PST LowPressurePlasmaSurfaceMachineType Advanced |
O |