OPC Foundation
  • Documents
  • NodeSets
  • Search
8.2.2.5 PST Atmospheric Pressure Facet

This Facet defines support of Atmospheric Pressure Plasma Surface Technology functionality. At least one of the optional Conformance Units must be implemented.

Table 64 – PST Atmospheric Pressure Facet

Group

Conformance Unit/ Profile Title

M / O

PlasmaSurfaceTechnology

PST AtmosphericPressurePlasmaSurfaceMachineType Basic

M

PlasmaSurfaceTechnology

PST AtmosphericPressurePlasmaSurfaceMachineType StateMachine

O

PlasmaSurfaceTechnology

PST AtmosphericPressurePlasmaSurfaceMachineType Advanced

O

Please report errors or issues with the site to webmaster.

Copyright © 2025 - OPC Foundation