The LowPressurePlasmaSurfaceMachineType ObjectType is the representation of a plasma surface treatment machine that performs surface treatment at low pressure. The LowPressurePlasmaSurfaceMachineType is a SubType of the PlasmaSurfaceMachineType. This implies that all nodes of the PlasmaSurfaceMachineType are inherited by the LowPressurePlasmaSurfaceMachineType. The LowPressurePlasmaSurfaceMachineType is formally defined in Table 18.
Table 18 – LowPressurePlasmaSurfaceMachineType Definition
|
Attribute |
Value |
||||
|
BrowseName |
LowPressurePlasmaSurfaceMachineType |
||||
|
IsAbstract |
False |
||||
|
References |
Node Class |
BrowseName |
DataType |
TypeDefinition |
Other |
|
Subtype of the PlasmaSurfaceMachineType |
|||||
|
0:HasAddIn |
Object |
4:Components |
|
4:MachineComponentsType |
M |
|
0:HasComponent |
Object |
4:Monitoring |
|
4:MonitoringType |
M |
|
Conformance Units |
|||||
|
PST LowPressurePlasmaSurfaceMachineType Basic |
|||||
|
PST LowPressurePlasmaSurfaceMachineType StateMachine |
|||||
|
PST LowPressurePlasmaSurfaceMachineType HeatingSystem |
|||||
|
PST LowPressurePlasmaSurfaceMachineType WorkpieceMotionDevice |
|||||
|
PST LowPressurePlasmaSurfaceMachineType Advanced |
|||||
The components of the LowPressurePlasmaSurfaceMachineType have additional subcomponents which are defined in Table 19.
Table 19 – LowPressurePlasmaSurfaceMachineType Additional Subcomponents
|
Source Path |
Reference |
NodeClass |
BrowseName |
DataType |
TypeDefinition |
Others |
||
|
4:Components |
0:HasComponent |
Object |
<ProcessingChamber> |
|
ProcessingChamberType |
MP |
||
|
4:Components |
0:HasComponent |
Object |
<HeatingSystem> |
|
HeatingSystemType |
OP |
||
|
4:Components |
0:HasComponent |
Object |
<WorkpieceMotionDevice> |
|
WorkpieceMotionDeviceType |
OP |
||
|
0:HasAddIn |
Object |
4:MachineryItemState |
|
LowPressurePlasmaMachineryItemState_StateMachineType |
O |
ProcessingChamber is representing the processing chamber of the plasma surface treatment machine.
HeatingSystem is representing the heating system of the plasma surface treatment machine.
WorkpieceMotionDevice is representing the device that is moving the workpiece inside of the processing chamber.
NOTE: The LowPressurePlasmaSurfaceMachineType is a subtype of the PlasmaSurfacemachineType. The additional subcomponents mentioned above are referring to the mandatory Components of the PlasmaSurfacemachineType which is inherited to the LowPressurePlasmaSurfacemachineType.
For this specification the MachineryItemState defined in OPC UA for Machinery is extended by a SubStateMachine for the State NotExecuting. An exemplary illustration can be found in Figure 10.
Figure 10 - Extension of MachineryItemState for low pressure plasma surface treatment machines
For this, the LowPressurePlasmaMachineryItemState_StateMachineType is defined in Table 20.
Table 20 – LowPressurePlasmaMachineryItemState_StateMachineType Definition
|
Attribute |
Value |
||||
|
BrowseName |
LowPressurePlasmaMachineryItemState_StateMachineType |
||||
|
IsAbstract |
False |
||||
|
References |
Node Class |
BrowseName |
DataType |
TypeDefinition |
Other |
|
Subtype of 4:MachineryItemState_StateMachineType defined in OPC UA for Machinery (OPC 40001-1) |
|||||
|
0:HasComponent |
Object |
LowPressurePlasmaNotExecutingSubState |
|
LowPressurePlasmaNotExecutingSubState_StateMachineType |
M |
The State NotExecuting is overriden in the LowPressurePlasmaMachineryItemState_StateMachineType to get the additional reference defined in Table 21.
Table 21 – LowPressurePlasmaMachineryItemState_StateMachineType Additional References
|
SourceBrowsePath |
Reference Type |
Is Forward |
TargetBrowsePath |
|
LowPressurePlasmaNotExecutingSubState |
0:HasSubStateMachine |
False |
4:NotExecuting |
The LowPressurePlasmaNotExecutingSubState_StateMachineType is used for a SubStateMachine which divides the NotExecuting State into Vented and Standby. This SubStateMachine is not active if the parent State Executing is not active. In this case the CurrentState and LastTransition Variables of the LowPressurePlasmaNotExecutingSubState state machine shall have a status equal to Bad_StateNotActive.
The LowPressurePlasmaNotExecutingSubState_StateMachineType is formally defined in Table 22.
Table 22 – LowPressurePlasmaNotExecutingSubState_StateMachineType Definition
|
Attribute |
Value |
||||
|
BrowseName |
LowPressurePlasmaNotExecutingSubState_StateMachineType |
||||
|
IsAbstract |
False |
||||
|
References |
Node Class |
BrowseName |
DataType |
TypeDefinition |
Other |
|
Subtype of the 0:FiniteStateMachineType defined in OPC 10000-16, i.e. inheriting the InstanceDeclarations of that Node. |
|||||
|
0:HasProperty |
Variable |
0:DefaultInstanceBrowseName |
0:QualifiedName |
0:PropertyType |
|
|
0:HasComponent |
Object |
Vented |
|
0:StateType |
|
|
0:HasComponent |
Object |
Standby |
|
0:StateType |
|
|
0:HasComponent |
Object |
FromStandbyToVented |
|
0:TransitionType |
|
|
0:HasComponent |
Object |
FromVentedToStandby |
|
0:TransitionType |
|
The InstanceDeclaration of the LowPressurePlasmaNotExecutingSubState_StateMachineType has additional Attributes defined in Table 23.
Table 23 – LowPressurePlasmaNotExecutingSubState_StateMachineType Attribute values for child nodes
|
BrowsePath |
Value Attribute |
Description Attribute |
||
|
0:DefaultInstanceBrowseName |
LowPressurePlasmaNotExecutingSubState |
The default BrowseName for instances of the type |
||
|
Vented |
|
The machine is being prepared for the next run |
||
|
Standby |
|
The vacuum chamber is evacuated and the system is ready to start |
||
|
FromStandbyToVented |
|
Transition from state Standby to state Vented |
||
|
FromVentedToStandby |
|
Transition from state Vented to state Standby |
||
|
0 |
|
||
|
1 |
|
||
|
0 |
|
||
|
1 |
|
The components of the LowPressurePlasmaNotExecutingSubState_StateMachineType have additional references which are defined in Table 24.
Table 24 – LowPressurePlasmaNotExecutingSubState_StateMachineType Additional References
|
SourceBrowsePath |
Reference Type |
Is Forward |
TargetBrowsePath |
|
FromStandbyToVented |
0:FromState |
True |
Standby |
|
|
0:ToState |
True |
Vented |
|
FromVentedToStandby |
0:FromState |
True |
Vented |
|
|
0:ToState |
True |
Standby |