3.2.1

Plasma Generator

System for electrical excitation of the plasma.

3.2.2

Precursor System

System providing the initial substance for the chemical plasma reaction.

3.2.3

Gas System

System providing required gases to the process.

3.2.4

Plant Cooling System

System for cooling the plasma treatment machine.

3.2.5

Low Pressure Plasma Machine

Plasma machine for plasma surface treatment in the pressure range of a few Pascal.

3.2.6

Processing Chamber

Process vessel of a low pressure plasma machine.

3.2.6

Plasma Jet

Jet of process gas excited to plasma under atmospheric pressure.