OPC UA NodeSet - http://opcfoundation.org/UA/SurfaceTechnology/Plasma/#2026-01-01-1.0.0

http://opcfoundation.org/UA/SurfaceTechnology/Plasma/

1.0.0

2026-01-01

The complete nodeset can be downloaded here.

The nodeset and any supplemental files can be found in GitHub.

http://opcfoundation.org/UA/ [1.05.05 2025-06-30]

http://opcfoundation.org/UA/DI/ [1.04.0 2022-11-03]

http://opcfoundation.org/UA/IA/ [1.01.2 2024-02-28]

http://opcfoundation.org/UA/Machinery/ [1.04.0 2025-07-01]

http://opcfoundation.org/UA/ISA95-JOBCONTROL_V2/ [2.0.0 2024-01-31]

http://opcfoundation.org/UA/Machinery/Jobs/ [1.0.1 2024-05-01]

OPC 40719: Surface Technology - Plasma Treatment Machinery 1.00

AtmosphericPressurePlasmaMachineryItemState_StateMachineType

AtmosphericPressurePlasmaNotExecutingSubState_StateMachineType

AtmosphericPressurePlasmaSurfaceMachineType

CirculationSystemType

GasSystemType

HeatingSystemType

LowPressurePlasmaMachineryItemState_StateMachineType

LowPressurePlasmaNotExecutingSubState_StateMachineType

LowPressurePlasmaSurfaceMachineType

PlantCoolingSystemType

PlasmaGeneratorType

PlasmaJetType

PlasmaSurfaceMachineType

PrecursorSystemType

ProcessingChamberType

RegulatorType

WorkpieceMotionDeviceType

http://opcfoundation.org/UA/SurfaceTechnology/Plasma/