http://opcfoundation.org/UA/SurfaceTechnology/Plasma/
1.0.0
2026-01-01
| NodeId | ns=1;i=1006 |
| NodeClass | ObjectType |
| BrowseName | 1:LowPressurePlasmaSurfaceMachineType |
| DisplayName | LowPressurePlasmaSurfaceMachineType |
| BaseType | 1:PlasmaSurfaceMachineType |
| IsAbstract | False |
| Reference | NodeClass | BrowseName | TypeDefinition | DataType | Other |
|---|---|---|---|---|---|
| 0:HasAddIn | Object | 2:Components | 2:MachineComponentsType | M | |
| 0:HasComponent | Object | 2:Monitoring | 2:MonitoringType | M |