RegulatorType

http://opcfoundation.org/UA/SurfaceTechnology/Plasma/

1.0.0

2026-01-01


NodeId ns=1;i=1011
NodeClass ObjectType
BrowseName 1:RegulatorType
DisplayName RegulatorType
BaseType 0:BaseObjectType
IsAbstract False
Reference NodeClass BrowseName TypeDefinition DataType Other
0:HasProperty Variable 1:CorrectionFactor 0:PropertyType 0:Double O
0:HasComponent Variable 1:GasConsumption 0:AnalogUnitType 0:Double O
0:HasComponent Variable 1:GasFlow 0:AnalogUnitType 0:Double O
0:HasComponent Variable 1:HeaterTemperature 0:AnalogUnitType 0:Double O
0:HasComponent Variable 1:JetHeadTemperature 0:AnalogUnitType 0:Double O
0:HasComponent Variable 1:PrecursorMassFlow 0:AnalogUnitType 0:Double O
0:HasComponent Variable 1:PrecursorVolumeFlow 0:AnalogUnitType 0:Double O
0:HasComponent Variable 1:TFittingTemperature 0:AnalogUnitType 0:Double O
0:HasComponent Variable 1:TypeOfGas 0:MultiStateValueDiscreteType 0:UInt16 O
0:HasComponent Variable 1:TypeOfPrecursorFluid 0:MultiStateValueDiscreteType 0:UInt16 O