http://opcfoundation.org/UA/SurfaceTechnology/Plasma/
1.0.0
2026-01-01
| NodeId | ns=1;i=1013 |
| NodeClass | ObjectType |
| BrowseName | 1:LowPressurePlasmaNotExecutingSubState_StateMachineType |
| DisplayName | LowPressurePlasmaNotExecutingSubState_StateMachineType |
| BaseType | 0:FiniteStateMachineType |
| IsAbstract | False |
| Reference | NodeClass | BrowseName | TypeDefinition | DataType | Other |
|---|---|---|---|---|---|
| 0:HasProperty | Variable | 0:DefaultInstanceBrowseName | 0:PropertyType | 0:QualifiedName | |
| 0:HasComponent | Object | 1:FromStandbyToVented | 0:TransitionType | ||
| 0:HasComponent | Object | 1:FromVentedToStandby | 0:TransitionType | ||
| 0:HasComponent | Object | 1:Standby | 0:StateType | ||
| 0:HasComponent | Object | 1:Vented | 0:StateType |