Table 60 lists all Profiles defined in this document and defines their URIs.
Table 60 – Profile URIs for OPC UA for Plasma Surface Technology
|
Profile |
URI |
|
PST Basic Server Facet |
http://opcfoundation.org/UA-Facet/PlasmaSurfaceTechnology/Server/PSTBasicServer |
|
PST Advanced Server Facet |
http://opcfoundation.org/UA-Facet/PlasmaSurfaceTechnology/Server/PSTAdvancedServer |
|
PST Low Pressure Facet |
http://opcfoundation.org/UA-Facet/PlasmaSurfaceTechnology/Server/PSTLowPressure |
|
PST Atmospheric Pressure Facet |
http://opcfoundation.org/UA-Facet/PlasmaSurfaceTechnology/Server/PSTAtmosphericPressure |