The following sections specify the Facets available for Servers that implement the Plasma Surface Technology companion specification. Each section defines and describes a Facet or Profile.
This Facet defines support for base Plasma Surface Technology functionality. At least five of the optional Conformance Units must be implemented.
Table 61 – PST Basic Server Facet
|
Group |
Conformance Unit/ Profile Title |
M / O |
|
PlasmaSurfaceTechnology |
PST PlasmaSurfaceMachineType Basic |
M |
|
PlasmaSurfaceTechnology |
PST PlasmaGeneratorType Basic |
O |
|
PlasmaSurfaceTechnology |
PST PrecursorSystemType Basic |
O |
|
PlasmaSurfaceTechnology |
PST GasSystemType Basic |
O |
|
PlasmaSurfaceTechnology |
PST PlantCoolingSystemType Basic |
O |
|
PlasmaSurfaceTechnology |
PST ProcessingChamberType Basic |
O |
|
PlasmaSurfaceTechnology |
PST HeatingSystemType Basic |
O |
|
PlasmaSurfaceTechnology |
PST WorkpieceMotionDeviceType Basic |
O |
|
PlasmaSurfaceTechnology |
PST PlasmaJetType Basic |
O |
This Facet defines support for advanced Plasma Surface Technology functionality. At least five of the optional Conformance Units must be implemented.
Table 62 – PST Advanced Server Facet
|
Group |
Conformance Unit/ Profile Title |
M / O |
|
PlasmaSurfaceTechnology |
PST PlasmaSurfaceMachineType Basic |
M |
|
PlasmaSurfaceTechnology |
PST PlasmaGeneratorType Advanced |
O |
|
PlasmaSurfaceTechnology |
PST PrecursorSystemType Advanced |
O |
|
PlasmaSurfaceTechnology |
PST GasSystemType Advanced |
O |
|
PlasmaSurfaceTechnology |
PST PlantCoolingSystemType Advanced |
O |
|
PlasmaSurfaceTechnology |
PST ProcessingChamberType Advanced |
O |
|
PlasmaSurfaceTechnology |
PST HeatingSystemType Advanced |
O |
|
PlasmaSurfaceTechnology |
PST WorkpieceMotionDeviceType Advanced |
O |
|
PlasmaSurfaceTechnology |
PST PlasmaJetType Advanced |
O |
|
PlasmaSurfaceTechnology |
PST PlasmaSurfaceMachineType OperationMode |
O |
|
PlasmaSurfaceTechnology |
PST PlasmaSurfaceMachineType JobManagement |
O |
This Facet defines support of Low Pressure Plasma Surface Technology functionality. At least one of the optional Conformance Units has to be implemented.
Table 63 – PST Low Pressure Facet
|
Group |
Conformance Unit/ Profile Title |
M / O |
|
PlasmaSurfaceTechnology |
PST LowPressurePlasmaSurfaceMachineType Basic |
M |
|
PlasmaSurfaceTechnology |
PST LowPressurePlasmaSurfaceMachineType StateMachine |
O |
|
PlasmaSurfaceTechnology |
PST LowPressurePlasmaSurfaceMachineType HeatingSystem |
O |
|
PlasmaSurfaceTechnology |
PST LowPressurePlasmaSurfaceMachineType WorkpieceMotionDevice |
O |
|
PlasmaSurfaceTechnology |
PST LowPressurePlasmaSurfaceMachineType Advanced |
O |
This Facet defines support of Atmospheric Pressure Plasma Surface Technology functionality. At least one of the optional Conformance Units must be implemented.
Table 64 – PST Atmospheric Pressure Facet
|
Group |
Conformance Unit/ Profile Title |
M / O |
|
PlasmaSurfaceTechnology |
PST AtmosphericPressurePlasmaSurfaceMachineType Basic |
M |
|
PlasmaSurfaceTechnology |
PST AtmosphericPressurePlasmaSurfaceMachineType StateMachine |
O |
|
PlasmaSurfaceTechnology |
PST AtmosphericPressurePlasmaSurfaceMachineType Advanced |
O |