Search

1 result(s) for LowerLimitDesignTemperature

• OPC-30250 – OPC Unified Architecture for DEXPI
  8.10 ChamberType
  BaseDataVariableType O 0:HasComponent Variable LowerLimitDesignPressure 0:Double 0:AnalogUnitType O 0:HasComponent Variable LowerLimitDesignTemperature 0:Double 0:AnalogUnitType O 0:HasComponent Variable ChamberFunctionSpecialization ChamberFunctionClassification 0:BaseDataVariableType O UpperLimitDesignTemperature ... function of the Chamber. LowerLimitDesignPressure - The lowest pressure for which the Chamber is designed. LowerLimitDesignTemperature - The lowest temperature for which the Chamber is designed. ChamberFunctionSpecialization - A specialization indicating the function