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1 result(s) for ChamberFunctionSpecialization

• OPC-30250 – OPC Unified Architecture for DEXPI
  8.10 ChamberType
  AnalogUnitType O 0:HasComponent Variable LowerLimitDesignTemperature 0:Double 0:AnalogUnitType O 0:HasComponent Variable ChamberFunctionSpecialization ChamberFunctionClassification 0:BaseDataVariableType O UpperLimitDesignTemperature - The highest temperature for which the Chamber is designed. NominalDiameter ... Chamber is designed. LowerLimitDesignTemperature - The lowest temperature for which the Chamber is designed. ChamberFunctionSpecialization - A specialization indicating the function of the Chamber