The GasSystemType provides all relevant Variables and parameters for monitoring a gas supply system of a plasma surface treatment machine. An overview of the information model is shown in Figure 14.

image019.png

Figure 14 - GasSystemType overview

The GasSystemType is formally defined in Table 38.

Table 38 – GasSystemType Definition

Attribute

Value

BrowseName

GasSystemType

IsAbstract

False

References

Node Class

BrowseName

DataType

TypeDefinition

Other

Subtype of the BaseObjectType defined in OPC 10000-5

0:HasAddIn

Object

2:Identification

4:MachineryComponentIdentificationType

O

0:HasAddIn

Object

4:Components

4:MachineComponentsType

M

0:HasComponent

Object

4:Monitoring

4:MonitoringType

M

0:HasComponent

Object

4:MachineryBuildingBlocks

0:FolderType

M

Conformance Units

PST GasSystemType Basic

PST GasSystemType Advanced

Identification is used as defined in OPC 40001-1. Shall also be referenced as AddIn in the MachineryBuildingBlocks Folder.

Components is representing a collection of all physical components of the gas system of a plasma surface treatment machine.

Monitoring is representing a collection of the variables that are assigned to this specific component.

MachineryBuildingBlocks is representing a folder that directly references all those building blocks of the OPC UA for Machinery (OPC 40001-1, OPC 40001-3) which are implemented as an add-in in this specific component.

The components of the GasSystemType have additional references which are defined in Table 39.

Table 39 – GasSystemType Additional References

SourceBrowsePath

Reference Type

Is Forward

TargetBrowsePath

4:MachineryBuildingBlocks

0:HasAddIn

True

2:Identification

4:MachineryBuildingBlocks

0:HasAddIn

True

4:Components

4:MachineryBuildingBlocks

0:HasAddIn

True

4:Monitoring

The components of the GasSystemType have additional subcomponents which are defined in Table 40.

Table 40 – GasSystemType Additional Subcomponents

Source Path

Reference

NodeClass

BrowseName

DataType

TypeDefinition

Others

4:Monitoring

4:Process

0:HasComponent

Variable

PrimaryPressureControl

0:Double

0:AnalogUnitType

O, RO

4:Components

0:HasComponent

Object

<GasRegulator>

RegulatorType

OP

PrimaryPressureControl is representing the prepressure of the gas system.

GasRegulator is representing an instance of a single gas regulator of the gas system.