This Facet defines support for base Plasma Surface Technology functionality. At least five of the optional Conformance Units must be implemented.
Table 61 – PST Basic Server Facet
|
Group |
Conformance Unit/ Profile Title |
M / O |
|
PlasmaSurfaceTechnology |
PST PlasmaSurfaceMachineType Basic |
M |
|
PlasmaSurfaceTechnology |
PST PlasmaGeneratorType Basic |
O |
|
PlasmaSurfaceTechnology |
PST PrecursorSystemType Basic |
O |
|
PlasmaSurfaceTechnology |
PST GasSystemType Basic |
O |
|
PlasmaSurfaceTechnology |
PST PlantCoolingSystemType Basic |
O |
|
PlasmaSurfaceTechnology |
PST ProcessingChamberType Basic |
O |
|
PlasmaSurfaceTechnology |
PST HeatingSystemType Basic |
O |
|
PlasmaSurfaceTechnology |
PST WorkpieceMotionDeviceType Basic |
O |
|
PlasmaSurfaceTechnology |
PST PlasmaJetType Basic |
O |