The PrecursorSystemType provides all relevant Variables and parameters for monitoring a precursor system of a plasma surface treatment machine. An overview of the information model is shown in Figure 13.
Figure 13 - PrecursorSystemType overview
The PrecursorSystemType is formally defined in Table 35.
Table 35 – PrecursorSystemType Definition
|
Attribute |
Value |
||||
|
BrowseName |
PrecursorSystemType |
||||
|
IsAbstract |
False |
||||
|
References |
Node Class |
BrowseName |
DataType |
TypeDefinition |
Other |
|
Subtype of the BaseObjectType defined in OPC 10000-5 |
|||||
|
0:HasAddIn |
Object |
2:Identification |
|
4:MachineryComponentIdentificationType |
O |
|
0:HasAddIn |
Object |
4:Components |
|
4:MachineComponentsType |
M |
|
0:HasComponent |
Object |
4:Monitoring |
|
4:MonitoringType |
M |
|
0:HasComponent |
Object |
4:MachineryBuildingBlocks |
|
0:FolderType |
M |
|
Conformance Units |
|||||
|
PST PrecursorSystemType Basic |
|||||
|
PST PrecursorSystemType Advanced |
|||||
Identification is used as defined in OPC 40001-1 and shall also be referenced as AddIn in the MachineryBuildingBlocks Folder.
Components is representing a collection of all physical components of the precursor system of a plasma surface treatment machine.
Monitoring is representing a collection of the variables that are assigned to this specific component.
MachineryBuildingBlocks is representing a folder that directly references all those building blocks of the OPC UA for Machinery (OPC 40001-1, OPC 40001-3) which are implemented as an add-in in this specific component.
The components of the PrecursorSystemType have additional references which are defined in Table 36.
Table 36 – PrecursorSystemType Additional References
|
SourceBrowsePath |
Reference Type |
Is Forward |
TargetBrowsePath |
|
4:MachineryBuildingBlocks |
0:HasAddIn |
True |
2:Identification |
|
4:MachineryBuildingBlocks |
0:HasAddIn |
True |
4:Components |
|
4:MachineryBuildingBlocks |
0:HasAddIn |
True |
4:Monitoring |
The components of the PrecursorSystemType have additional subcomponents which are defined in Table 37.
Table 37 – PrecursorSystemType Additional Subcomponents
|
Source Path |
Reference |
NodeClass |
BrowseName |
DataType |
TypeDefinition |
Others |
||
|
0:HasComponent |
Variable |
PrimaryPressureControl |
0:Double |
0:AnalogUnitType |
O, RO |
||
|
4:Components |
0:HasComponent |
Object |
<PrecursorRegulator> |
|
RegulatorType |
OP |
PrimaryPressureControl is representing the prepressure of the precursor system.
PrecursorRegulator is representing an instance of a single precursor regulator of the gas system.