The LowPressurePlasmaNotExecutingSubState_StateMachineType is used for a SubStateMachine which divides the NotExecuting State into Vented and Standby. This SubStateMachine is not active if the parent State Executing is not active. In this case the CurrentState and LastTransition Variables of the LowPressurePlasmaNotExecutingSubState state machine shall have a status equal to Bad_StateNotActive.

The LowPressurePlasmaNotExecutingSubState_StateMachineType is formally defined in Table 22.

Table 22 – LowPressurePlasmaNotExecutingSubState_StateMachineType Definition

Attribute

Value

BrowseName

LowPressurePlasmaNotExecutingSubState_StateMachineType

IsAbstract

False

References

Node Class

BrowseName

DataType

TypeDefinition

Other

Subtype of the 0:FiniteStateMachineType defined in OPC 10000-16, i.e. inheriting the InstanceDeclarations of that Node.

0:HasProperty

Variable

0:DefaultInstanceBrowseName

0:QualifiedName

0:PropertyType

0:HasComponent

Object

Vented

0:StateType

0:HasComponent

Object

Standby

0:StateType

0:HasComponent

Object

FromStandbyToVented

0:TransitionType

0:HasComponent

Object

FromVentedToStandby

0:TransitionType

The InstanceDeclaration of the LowPressurePlasmaNotExecutingSubState_StateMachineType has additional Attributes defined in Table 23.

Table 23 – LowPressurePlasmaNotExecutingSubState_StateMachineType Attribute values for child nodes

BrowsePath

Value Attribute

Description Attribute

0:DefaultInstanceBrowseName

LowPressurePlasmaNotExecutingSubState

The default BrowseName for instances of the type

Vented

The machine is being prepared for the next run

Standby

The vacuum chamber is evacuated and the system is ready to start

FromStandbyToVented

Transition from state Standby to state Vented

FromVentedToStandby

Transition from state Vented to state Standby

Vented

0:StateNumber

0

Standby

0:StateNumber

1

FromStandbyToVented

0:TransitionNumber

0

FromVentedToStandby

0:TransitionNumber

1

The components of the LowPressurePlasmaNotExecutingSubState_StateMachineType have additional references which are defined in Table 24.

Table 24 – LowPressurePlasmaNotExecutingSubState_StateMachineType Additional References

SourceBrowsePath

Reference Type

Is Forward

TargetBrowsePath

FromStandbyToVented

0:FromState

True

Standby

0:ToState

True

Vented

FromVentedToStandby

0:FromState

True

Vented

0:ToState

True

Standby