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Scope: Core (OPC-10000-*) All specs

3 result(s) for PlasmaSurfaceMachineType

OPC-40719 – OPC UA for Plasma Surface Technology

7.1 PlasmaSurfaceMachineType ObjectType Definition

BrowseName nsu=http://opcfoundation.org/UA/SurfaceTechnology/Plasma/;PlasmaSurfaceMachineType · NodeId nsu=http://opcfoundation.org/UA/SurfaceTechnology/Plasma/;i=1003
OPC-40719 – OPC UA for Plasma Surface Technology

7.2.1 Overview

BrowseName nsu=http://opcfoundation.org/UA/SurfaceTechnology/Plasma/;LowPressurePlasmaSurfaceMachineType · NodeId nsu=http://opcfoundation.org/UA/SurfaceTechnology/Plasma/;i=1006
OPC-40719 – OPC UA for Plasma Surface Technology

7.3.1 Overview

BrowseName nsu=http://opcfoundation.org/UA/SurfaceTechnology/Plasma/;AtmosphericPressurePlasmaSurfaceMachineType · NodeId nsu=http://opcfoundation.org/UA/SurfaceTechnology/Plasma/;i=1009