The PlasmaSurfaceMachineType ObjectType defines the representation of a plasma surface treatment machine. The PlasmaSurfaceMachineType represents the SuperType of the LowPressurePlasmaSurfaceMachineType and the AtmosphericPressurePlasmaSurfaceMachineType, as shown in Figure 8.

Figure 8 - Subtypes of the PlasmaSurfaceMachineType

Figure 9 - PlasmaSurfaceMachineType overview

Figure 9 shows the hierarchical structure with some details of this ObjectType. The PlasmaSurfaceMachineType is formally defined in Table 15.

Table 15 – PlasmaSurfaceMachineType Definition

Attribute	Value
BrowseName	PlasmaSurfaceMachineType
IsAbstract	False
References	Node Class	BrowseName	DataType	TypeDefinition	Other
Subtype of the BaseObjectType defined in OPC 10000-5
0:HasAddIn	Object	2:Identification		4:MachineIdentificationType	M
0:HasAddIn	Object	4:Components		4:MachineComponentsType	M
0:HasComponent	Object	4:Monitoring		4:MonitoringType	M
0:HasAddIn	Object	6:JobManagement		6:JobManagementType	O
0:HasComponent	Object	4:MachineryBuildingBlocks		0:FolderType	M
Conformance Units
PST PlasmaSurfaceMachineType Basic
PST PlasmaSurfaceMachineType JobManagement
PST PlasmaSurfaceMachineType OperationMode
PST PlasmaSurfaceMachineType Advanced

Identification is used as defined in OPC 40001-1 and shall also be referenced as AddIn in the

MachineryBuildingBlocks Folder.

Components is representing a collection of all physical components of the plasma surface treatment machine.

Monitoring is representing a collection of the variables that are not assigned to a component but to the overall plasma surface treatment machine.

MachineryOperationCounter is used as defined in OPC 40001-1. In the information model for plasma surface machines, all counters that are implemented according to the MachineryOperationCounterType of the OPC 40001-1 shall be integrated with the HasComponent reference under this Object. This Object shall also be referenced as AddIn in the MachineryBuildingBlocks Folder.

MachineryLifetimeCounter is used as defined in OPC 40001-1. In the information model for plasma surface machines, all counters that are implemented according to the MachineryLifetimeCounterType of the OPC 40001-1 shall be integrated with the HasComponent reference under this Object. This Object shall also be referenced as AddIn in the MachineryBuildingBlocks Folder.

JobManagement is used as defined in OPC 40001-3 and shall also be referenced as AddIn in the MachineryBuildingBlocks Folder.

MachineryBuildingBlocks is representing a folder that directly references all those building blocks of the OPC UA for Machinery (OPC 40001-1, OPC 40001-3) which are implemented as an add-in in the PlasmaSurfaceMachineType or it’s subtypes.

The components of the PlasmaSurfaceMachineType have additional references which are defined in Table 16.

Table 16 – PlasmaSurfaceMachineType Additional References

SourceBrowsePath	Reference Type	Is Forward	TargetBrowsePath
4:MachineryBuildingBlocks	0:HasAddIn	True	2:Identification
4:MachineryBuildingBlocks	0:HasAddIn	True	4:Components
4:MachineryBuildingBlocks	0:HasAddIn	True	6:JobManagement
4:MachineryBuildingBlocks	0:HasAddIn	True	4:Monitoring

The components of the PlasmaSurfaceMachineType have additional subcomponents which are defined in Table 17.

Table 17 – PlasmaSurfaceMachineType Additional Subcomponents

Source Path	Reference	NodeClass	BrowseName	DataType	TypeDefinition	Others
4:Components	0:HasComponent	Object	<PlasmaGenerator>		PlasmaGeneratorType	MP
4:Components	0:HasComponent	Object	<PrecursorSystem>		PrecursorSystemType	OP
4:Components	0:HasComponent	Object	<GasSystem>		GasSystemType	MP
4:Components	0:HasComponent	Object	<PlantCoolingSystem>		PlantCoolingSystemType	OP
4:Monitoring 4:Status	0:HasProperty	Variable	MainSwitchOn	0:Boolean	0:PropertyType	M, RO
4:Monitoring 4:Consumption	0:HasComponent	Variable	PowerConsumption	0:Double	0:AnalogUnitType	O, RO
4:Monitoring 4:Process	0:HasComponent	Variable	SubstrateTemperature	0:Double	0:AnalogUnitType	O, RO

PlasmaGenerator is representing the plasma power supply of the plasma surface treatment machine.

PrecursorSystem is representing the precursor system of the plasma surface treatment machine.

GasSystem is representing the gas supply system of the plasma surface treatment machine.

PlantCoolingSystem is representing the cooling system of the plasma surface treatment machine.

MainSwitchOn is representing the power on status of the plasma surface treatment machine. True means the machine is powered.

PowerConsumption is representing the total power consumption of the plasma surface treatment machine including all its components.

SubstrateTemperature is representing the current temperature of the substrate. The substrate is the workpiece to be plasma treated.

NOTE regarding MachineryOperationMode: The working group for plasma surface treatment machines has agreed that a state transition between the "Maintenance" and "Processing" states does not exist for the plasma surface treatment machines. It is therefore not permitted to execute the TransisionType FromMaintenanceToProcessing and FromProcessingToMaintenance of OPC 40001-1.