The PlasmaGeneratorType provides all relevant Variables and parameters for monitoring a plasma generator of a plasma surface treatment machine. An overview of the information model is shown in Figure 12.
Figure 12 - PlasmaGeneratorType overview
The PlasmaGeneratorType is formally defined in Table 32.
Table 32 – PlasmaGeneratorType Definition
|
Attribute |
Value |
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|
BrowseName |
PlasmaGeneratorType |
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|
IsAbstract |
False |
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|
References |
Node Class |
BrowseName |
DataType |
TypeDefinition |
Other |
|
Subtype of the BaseObjectType defined in OPC 10000-5 |
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|
0:HasAddIn |
Object |
2:Identification |
|
4:MachineryComponentIdentificationType |
O |
|
0:HasComponent |
Object |
4:Monitoring |
|
4:MonitoringType |
M |
|
0:HasComponent |
Object |
4:MachineryBuildingBlocks |
|
0:FolderType |
M |
|
Conformance Units |
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|
PST PlasmaGeneratorType Basic |
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|
PST PlasmaGeneratorType Advanced |
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Identification is used as defined in OPC 40001-1 and shall also be referenced as AddIn in the MachineryBuildingBlocks Folder.
Monitoring is representing a collection of the variables that are assigned to this specific component.
MachineryBuildingBlocks is representing a folder that directly references all those building blocks of the OPC UA for Machinery (OPC 40001-1, OPC 40001-3) which are implemented as an add-in in this specific component.
The components of the PlasmaGeneratorType have additional references which are defined in Table 33.
Table 33 – PlasmaGeneratorType Additional References
|
SourceBrowsePath |
Reference Type |
Is Forward |
TargetBrowsePath |
|
4:MachineryBuildingBlocks |
0:HasAddIn |
True |
2:Identification |
|
4:MachineryBuildingBlocks |
0:HasAddIn |
True |
4:Monitoring |
The components of the PlasmaGeneratorType have additional subcomponents which are defined in Table 34.
Table 34 – PlasmaGeneratorType Additional Subcomponents
|
Source Path |
Reference |
NodeClass |
BrowseName |
DataType |
TypeDefinition |
Others |
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|
0:HasComponent |
Variable |
EvaporatorCurrent |
0:Double |
0:AnalogUnitType |
O, RO |
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|
0:HasComponent |
Variable |
EvaporatorVoltage |
0:Double |
0:AnalogUnitType |
O, RO |
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|
0:HasComponent |
Variable |
EvaporatorPower |
0:Double |
0:AnalogUnitType |
O, RO |
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|
0:HasComponent |
Variable |
BiasCurrent |
0:Double |
0:AnalogUnitType |
O, RO |
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|
0:HasComponent |
Variable |
BiasVoltage |
0:Double |
0:AnalogUnitType |
O, RO |
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|
0:HasComponent |
Variable |
BiasPower |
0:Double |
0:AnalogUnitType |
O, RO |
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|
0:HasProperty |
Variable |
BiasGeneratorSwitchOn |
0:Boolean |
0:PropertyType |
O, RO |
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|
0:HasComponent |
Variable |
BiasArcCounter |
UInt32 |
0:AnalogUnitType |
O, RO |
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|
0:HasProperty |
Variable |
EvaporatorGeneratorSwitchOn |
0:Boolean |
0:PropertyType |
O, RO |
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|
0:HasProperty |
Variable |
PlasmaReadyToStart |
0:Boolean |
0:PropertyType |
O, RO |
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|
0:HasProperty |
Variable |
PlasmaActive |
0:Boolean |
0:PropertyType |
O, RO |
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|
0:HasComponent |
Variable |
BiasPulseFrequency |
0:Double |
0:AnalogUnitType |
O, RO |
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|
0:HasComponent |
Variable |
BiasDutyCycle |
UInt16 |
0:AnalogUnitType |
O, RO |
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|
0:HasProperty |
Variable |
BiasPolarity |
0:String |
0:PropertyType |
O, RO |
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|
0:HasComponent |
Variable |
EvaporatorPulseFrequency |
0:Double |
0:AnalogUnitType |
O, RO |
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|
0:HasComponent |
Variable |
EvaporatorDutyCycle |
UInt16 |
0:AnalogUnitType |
O, RO |
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|
0:HasProperty |
Variable |
EvaporatorPolarity |
0:String |
0:PropertyType |
O, RO |
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|
0:HasComponent |
Variable |
BiasReversePower |
0:Double |
0:AnalogUnitType |
O, RO |
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|
0:HasComponent |
Variable |
EvaporatorReversePower |
0:Double |
0:AnalogUnitType |
O, RO |
EvaporatorCurrent is representing the present current of the evaporator.
EvaporatorVoltage is representing the present voltage of the evaporator.
EvaporatorPower is representing the present power of the evaporator.
BiasCurrent is representing the present current of the bias.
BiasVoltage is representing the present voltage of the bias.
BiasPower is representing the present power of the bias.
BiasGeneratorSwitchOn is indicating the power on status of the bias generator. True means the generator is switched on.
BiasArcCounter is counting the amount of arc events during the process.
EvaporatorGeneratorSwitchOn is indicating the power on status of the evaporator generator. True means the generator is switched on.
PlasmaReadyToStart is indicating if the plasma can be switched on. True means the plasma can be switched on.
PlasmaActive is indicating if the plasma is working.
BiasPulseFrequency is representing the output frequency of the bias generator.
BiasDutyCycle is a descriptive property of BiasPulseFrequency. It is representing the pulse ontime in percent.
BiasPolarity is a descriptive property of BiasPulseFrequency. It is indicating what polarity the BiasPulseFrequence has.
EvaporatorPulseFrequency is representing the output frequency of the evaporator generator.
EvaporatorDutyCycle is a descriptive property of EvaporatorPulseFrequency. It is representing the pulse ontime in percent.
EvaporatorPolarity is a descriptive property of EvaporatorPulseFrequency. It is indicating what polarity the EvaporatorPulseFrequence has.
BiasReversePower is representing the power which flows back into the generator. It is also known by the name “reflected power”.
EvaporatorReversePower is representing the power which flows back into the generator. It is also known by the name “reflected power”.