The ProcessingChamberType provides all relevant Variables and parameters for monitoring a processing chamber of a low pressure plasma surface treatment machine. An overview of the information model is shown in Figure 17.

Figure 17 - ProcessingChamberType overview

The ProcessingChamberType is formally defined in Table 47.

Table 47 – ProcessingChamberType Definition

Attribute	Value
BrowseName	ProcessingChamberType
IsAbstract	False
References	Node Class	BrowseName	DataType	TypeDefinition	Other
Subtype of the BaseObjectType defined in OPC 10000-5
0:HasAddIn	Object	2:Identification		4:MachineryComponentIdentificationType	O
0:HasComponent	Object	4:Monitoring		4:MonitoringType	M
0:HasComponent	Object	4:MachineryBuildingBlocks		0:FolderType	M
Conformance Units
PST ProcessingChamberType Basic
PST ProcessingChamberType Advanced

Identification is used as defined in OPC 40001-1. Shall also be referenced as AddIn in the MachineryBuildingBlocks Folder.

Monitoring is representing a collection of the variables that are assigned to this specific component.

MachineryOperationCounter is used as defined in OPC 40001-1. In the component ProcessingChamberType all counters that are implemented according to the MachineryOperationCounterType of the OPC 40001-1 shall be integrated with the HasComponent reference under this Object. This Object shall also be referenced as AddIn in the MachineryBuildingBlocks Folder.

MachineryBuildingBlocks is representing a folder that directly references all those building blocks of the OPC UA for Machinery (OPC 40001-1, OPC 40001-3) which are implemented as an add-in in this specific component.

The components of the ProcessingChamberType have additional references which are defined in Table 48.

Table 48 – ProcessingChamberType Additional References

SourceBrowsePath	Reference Type	Is Forward	TargetBrowsePath
4:MachineryBuildingBlocks	0:HasAddIn	True	2:Identification
4:MachineryBuildingBlocks	0:HasAddIn	True	4:Monitoring

The components of the ProcessingChamberType have additional subcomponents which are defined in Table 49.

Table 49 – ProcessingChamberType Additional Subcomponents

Source Path	Reference	NodeClass	BrowseName	DataType	TypeDefinition	Others
4:Monitoring 4:Process	0:HasComponent	Variable	ChamberPrePressure	0:Double	0:AnalogUnitType	O, RO
4:Monitoring 4:Process	0:HasComponent	Variable	ChamberPressure	0:Double	0:AnalogUnitType	M, RO
4:Monitoring 4:Process	0:HasComponent	Variable	ChamberTemperature	0:Double	0:AnalogUnitType	O, RO
4:Monitoring 4:Process	0:HasProperty	Variable	PumpDownTime	0:DurationString	0:PropertyType	O, RO
4:Monitoring 4:Process	0:HasComponent	Variable	LeakRate	0:Double	0:AnalogUnitType	O, RO

ChamberPrePressure is representing the current pre-pressure of the processing chamber.

ChamberPressure is representing the current pressure inside the processing chamber.

ChamberTemperature is representing the current temperature inside the processing chamber.

PumpDownTime is representing the time needed for evacuating the processing chamber. When the evacuation of the processing chamber has not yet been completed, the PumpDownTime is the time required so far. When the target pressure of the processing chamber has been reached, the PumpDownTime represents the total duration of the evacuation.

LeakRate is representing in what period of time the processing chamber loses what pressure.