ISA95Attribute is a minimum set of industry-independent information and is described in the attribute table defined in ISA-95. ISA-95 doesn’t describe an attribute in UML. In OPC UA it can be represented by Attributes, VariableTypes, Variables, and Properties (see Table 4),

Table 4 – Transformation rule of an ISA95Attribute

ISA-95	OPC UA	Description
Table of ISA95 Attribute	Attribute	ISA95ID, ISA95Description, and ISA95ValueAttribute are transformed into attributes of Object or DataVariable. Other Attributes are transformed into Properties of the Object or DataVariable.
	Variable		VariableType	Property