The DefectDetectedLogType is used for the logging defect detection by a DefectDetectionSensor of a MachineModule.
Table 54 – DefectDetectedLogType Definition
|References||Node Class||BrowseName||DataType||TypeDefinition||Modelling Rule|
|Subtype of LogbookEventType|
The DefectEU Property represents the unit(s) of measure of the measurement that was identified as a defect.
The DefectPicture Property represents the picture that was identified as a defect.
The DefectValue Property represents the value(s) of the measurement that was identified as a defect.