This section provides an overview of the OPC UA information model for plasma surface treatment machines. The information model is structured in such a way that it represents the physical machine and its system components. The instantiation of the PlasmaSurfaceMachineType represents the entry point into the information model of each plasma surface treatment machine. An overview can be seen in Figure 6.

There are two folders on the first level which help to structure the information model. These are the Components folder, in which the physical objects and system components of a plasma surface treatment machine to be mapped are referenced, and the Monitoring folder, which contains all other variables relating to the overall machine.

Furthermore, several building blocks of the OPC UA for Machinery specification are used in this Companion Specification. This is the Building Block Identification, which maps all available characteristics of the system. The MachineryOperationCounter and the MachineryLifetimeCounter are used to map any counting series. The MachineryOperationMode represents a StateMachines provided by the OPC UA for Machinery. The MonitoringType contains all measured values. And the Building Block JobManagement can be used to map complex jobs on the machine. All Machinery Building Blocks are also referenced as an Addin in the MachineryBuildingBlocks folder.

Annex B contains two implementation examples of the described OPC UA Companion Specification for Plasma Surface Technology. In each case, a machine for the atmospheric pressure range B.2 and a system for the low pressure range B.1 were instantiated.

Figure 6 - Information Model overview