The RegulatorType provides a representation of a single gas or precursor regulator that is controlling the gas or precursor flow. An overview of the information model is shown in Figure 15.
Figure 15 - RegulatorType overview
The RegulatorType is formally defined in Table 41.
Table 41 – RegulatorType Definition
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Attribute |
Value |
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BrowseName |
RegulatorType |
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IsAbstract |
False |
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References |
Node Class |
BrowseName |
DataType |
TypeDefinition |
Other |
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Subtype of the BaseObjectType defined in OPC 10000-5 |
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0:HasComponent |
Variable |
TypeOfGas |
0:UInt16 |
0:MultiStateValueDiscreteType |
O, RW |
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0:HasProperty |
Variable |
CorrectionFactor |
0:Double |
0:PropertyType |
O, RW |
|
0:HasComponent |
Variable |
GasFlow |
0:Double |
0:AnalogUnitType |
O, RO |
|
0:HasComponent |
Variable |
GasConsumption |
0:Double |
0:AnalogUnitType |
O, RO |
|
0:HasComponent |
Variable |
TypeOfPrecursorFluid |
0:UInt16 |
0:MultiStateValueDiscreteType |
O, RW |
|
0:HasComponent |
Variable |
PrecursorMassFlow |
0:Double |
0:AnalogUnitType |
O, RO |
|
0:HasComponent |
Variable |
PrecursorVolumeFlow |
0:Double |
0:AnalogUnitType |
O, RO |
|
0:HasComponent |
Variable |
TFittingTemperature |
0:Double |
0:AnalogUnitType |
O, RO |
|
0:HasComponent |
Variable |
HeaterTemperature |
0:Double |
0:AnalogUnitType |
O, RO |
|
0:HasComponent |
Variable |
JetHeadTemperature |
0:Double |
0:AnalogUnitType |
O, RO |
GasType is representing the type of gas used.
CorrectionFactor is representing the correction factor of the used gas. As the gas regulator is calibrated to a specific gas, correction factors are required when using other gases. The CorrectionFactor is representing this factor for the gas used.
GasFlow is representing the flow of the gas through the gas system.
GasConsumption is representing the total gas consumption of the gas regulator.
TypeOfPrecursorFluid is indicating which type of precursor gas is used in the precursor system.
PrecursorMassFlow is representing the mass flow of the precursant gas through the precursor system.
PrecursorVolumeFlow is representing the volume flow of the precursant gas through the precursor system.
TFittingTemperature is representing the current temperature at the T-Fitting of the precursor system.
HeaterTemperature is representing the current temperature of the heater of the precursor system.
JetHeadTemperature is representing the current temperature of the jet head of the precursor system.
The component Variables of the RegulatorType have additional Attributes defined in Table 42.
Table 42 – RegulatorType Attribute values for child nodes
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BrowsePath |
Value Attribute |
Description Attribute |
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[ {"Value": 0, "DisplayName": "Ar", "Description": ""}, {"Value": 1, "DisplayName": "N2", "Description": ""}, {"Value": 2, "DisplayName": "CH4", "Description": ""}, {"Value": 3, "DisplayName": "C2H2", "Description": ""}, {"Value": 4, "DisplayName": "O2", "Description": ""}, {"Value": 5, "DisplayName": "H2", "Description": ""}, ] |
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[ {"Value": 0, "DisplayName": "Ar", "Description": ""}, {"Value": 1, "DisplayName": "N2", "Description": ""}, {"Value": 2, "DisplayName": "CH4", "Description": ""}, {"Value": 3, "DisplayName": "C2H2", "Description": ""}, {"Value": 4, "DisplayName": "O2", "Description": ""}, {"Value": 5, "DisplayName": "H2", "Description": ""}, ] |
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