NodeSet and supplementary files for Plasma Surface Technology Information Model
The Plasma Surface Technology Information Model is identified by the following URI:
http://opcfoundation.org/UA/SurfaceTechnology/Plasma/
Documentation for the NamespaceUri can be found here.
The NodeSet associated with this version of specification can be found here:
The NodeSet associated with the latest version of the specification can be found here:
Supplementary files for the Plasma Surface Technology Information Model can be found here:
The files associated with the latest version of the specification can be found here:
Capability Identifier
The capability identifier for this document shall be:
STPlasma
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