This Facet defines support for advanced Plasma Surface Technology functionality. At least five of the optional Conformance Units must be implemented.
Table 62 – PST Advanced Server Facet
|
Group |
Conformance Unit/ Profile Title |
M / O |
|
PlasmaSurfaceTechnology |
PST PlasmaSurfaceMachineType Basic |
M |
|
PlasmaSurfaceTechnology |
PST PlasmaGeneratorType Advanced |
O |
|
PlasmaSurfaceTechnology |
PST PrecursorSystemType Advanced |
O |
|
PlasmaSurfaceTechnology |
PST GasSystemType Advanced |
O |
|
PlasmaSurfaceTechnology |
PST PlantCoolingSystemType Advanced |
O |
|
PlasmaSurfaceTechnology |
PST ProcessingChamberType Advanced |
O |
|
PlasmaSurfaceTechnology |
PST HeatingSystemType Advanced |
O |
|
PlasmaSurfaceTechnology |
PST WorkpieceMotionDeviceType Advanced |
O |
|
PlasmaSurfaceTechnology |
PST PlasmaJetType Advanced |
O |
|
PlasmaSurfaceTechnology |
PST PlasmaSurfaceMachineType OperationMode |
O |
|
PlasmaSurfaceTechnology |
PST PlasmaSurfaceMachineType JobManagement |
O |