For this specification the MachineryItemState defined in OPC UA for Machinery is extended by a SubStateMachine for the State NotExecuting. An exemplary illustration can be found in Figure 10.
Figure 10 - Extension of MachineryItemState for low pressure plasma surface treatment machines
For this, the LowPressurePlasmaMachineryItemState_StateMachineType is defined in Table 20.
Table 20 – LowPressurePlasmaMachineryItemState_StateMachineType Definition
| 
 Attribute  | 
        
 Value  | 
||||
| 
 BrowseName  | 
        
 LowPressurePlasmaMachineryItemState_StateMachineType  | 
||||
| 
 IsAbstract  | 
        
 False  | 
||||
| 
 References  | 
        
 Node Class  | 
        
 BrowseName  | 
        
 DataType  | 
        
 TypeDefinition  | 
        
 Other  | 
| 
 Subtype of 4:MachineryItemState_StateMachineType defined in OPC UA for Machinery (OPC 40001-1)  | 
|||||
| 
 0:HasComponent  | 
        
 Object  | 
        
 LowPressurePlasmaNotExecutingSubState  | 
        
 
  | 
        
 LowPressurePlasmaNotExecutingSubState_StateMachineType  | 
        
 M  | 
The State NotExecuting is overriden in the LowPressurePlasmaMachineryItemState_StateMachineType to get the additional reference defined in Table 21.
Table 21 – LowPressurePlasmaMachineryItemState_StateMachineType Additional References
| 
 SourceBrowsePath  | 
        
 Reference Type  | 
        
 Is Forward  | 
        
 TargetBrowsePath  | 
| 
 LowPressurePlasmaNotExecutingSubState  | 
        
 0:HasSubStateMachine  | 
        
 False  | 
        
 4:NotExecuting  |