http://opcfoundation.org/UA/SurfaceTechnology/Plasma/ http://opcfoundation.org/UA/Machinery/ http://opcfoundation.org/UA/DI/ http://opcfoundation.org/UA/Machinery/Jobs/ http://opcfoundation.org/UA/ISA95-JOBCONTROL_V2/ i=1 i=4 i=5 i=6 i=7 i=11 i=12 i=13 i=17 i=20 i=21 i=37 i=40 i=45 i=46 i=47 i=51 i=52 i=95 i=117 i=256 i=291 i=296 i=887 i=7594 i=12879 i=17604 ns=5;i=3007 ns=5;i=3015 CirculationSystemType https://reference.opcfoundation.org/SurfaceTechnology/Plasma/v100/docs/7.8.2 i=58 ns=1;i=6108 ns=1;i=6106 CoolingCircuitFlowRate i=80 i=17497 ns=1;i=1017 ns=1;i=6109 EngineeringUnits i=78 i=68 ns=1;i=6108 CoolingCircuitTemperatureOutlet i=80 i=17497 ns=1;i=1017 ns=1;i=6107 EngineeringUnits i=78 i=68 ns=1;i=6106 GasSystemType PST GasSystemType Basic PST GasSystemType Advanced https://reference.opcfoundation.org/SurfaceTechnology/Plasma/v100/docs/7.6 i=58 ns=1;i=5042 ns=1;i=5041 ns=1;i=5044 ns=1;i=5043 Components i=78 ns=2;i=1006 ns=1;i=1007 ns=1;i=5046 ns=1;i=5044 <GasRegulator> i=11508 ns=1;i=1011 ns=1;i=5042 Identification i=80 ns=2;i=1005 ns=1;i=1007 ns=1;i=6069 ns=1;i=6070 ns=1;i=5044 Manufacturer A human-readable, localized name of the manufacturer of the MachineryItem. i=78 i=68 ns=1;i=5041 SerialNumber A string containing a unique production number of the manufacturer of the MachineryItem. The global uniqueness of the serial number is only given in the context of the manufacturer, and potentially the model. The value shall not change during the life-cycle of the MachineryItem. i=78 i=68 ns=1;i=5041 MachineryBuildingBlocks i=78 i=61 ns=1;i=1007 ns=1;i=5042 ns=1;i=5041 ns=1;i=5043 Monitoring i=78 ns=2;i=1014 ns=1;i=1007 ns=1;i=5045 ns=1;i=5044 Process Entry point for process information of the MachineryItem. i=80 i=61 ns=1;i=5043 ns=1;i=6071 PrimaryPressureControl i=80 i=17497 ns=1;i=5045 ns=1;i=6072 EngineeringUnits i=78 i=68 ns=1;i=6071 HeatingSystemType PST HeatingSystemType Basic PST HeatingSystemType Advanced https://reference.opcfoundation.org/SurfaceTechnology/Plasma/v100/docs/7.10 i=58 ns=1;i=5058 ns=1;i=5060 ns=1;i=5059 Identification i=80 ns=2;i=1005 ns=1;i=1023 ns=1;i=6121 ns=1;i=6122 ns=1;i=5060 Manufacturer A human-readable, localized name of the manufacturer of the MachineryItem. i=78 i=68 ns=1;i=5058 SerialNumber A string containing a unique production number of the manufacturer of the MachineryItem. The global uniqueness of the serial number is only given in the context of the manufacturer, and potentially the model. The value shall not change during the life-cycle of the MachineryItem. i=78 i=68 ns=1;i=5058 MachineryBuildingBlocks i=78 i=61 ns=1;i=1023 ns=1;i=5058 ns=1;i=5059 Monitoring i=78 ns=2;i=1014 ns=1;i=1023 ns=1;i=5061 ns=1;i=5060 Process Entry point for process information of the MachineryItem. i=80 i=61 ns=1;i=5059 ns=1;i=6123 ns=1;i=6127 ns=1;i=6129 ns=1;i=6125 HeaterCurrent i=80 i=17497 ns=1;i=5061 ns=1;i=6124 EngineeringUnits i=78 i=68 ns=1;i=6123 HeaterPower i=80 i=17497 ns=1;i=5061 ns=1;i=6128 EngineeringUnits i=78 i=68 ns=1;i=6127 HeaterTemperature i=78 i=17497 ns=1;i=5061 ns=1;i=6130 EngineeringUnits i=78 i=68 ns=1;i=6129 HeaterVoltage i=80 i=17497 ns=1;i=5061 ns=1;i=6126 EngineeringUnits i=78 i=68 ns=1;i=6125 PlantCoolingSystemType PST PlantCoolingSystemType Basic PST PlantCoolingSystemType Advanced https://reference.opcfoundation.org/SurfaceTechnology/Plasma/v100/docs/7.8.1 i=58 ns=1;i=5048 ns=1;i=5047 ns=1;i=5050 ns=1;i=5049 Components i=78 ns=2;i=1006 ns=1;i=1014 ns=1;i=5051 ns=1;i=5050 <CirculationSystem> ns=1;i=1017 i=11508 ns=1;i=5048 Identification i=80 ns=2;i=1005 ns=1;i=1014 ns=1;i=6094 ns=1;i=6095 ns=1;i=5050 Manufacturer A human-readable, localized name of the manufacturer of the MachineryItem. i=78 i=68 ns=1;i=5047 SerialNumber A string containing a unique production number of the manufacturer of the MachineryItem. The global uniqueness of the serial number is only given in the context of the manufacturer, and potentially the model. The value shall not change during the life-cycle of the MachineryItem. i=78 i=68 ns=1;i=5047 MachineryBuildingBlocks i=78 i=61 ns=1;i=1014 ns=1;i=5048 ns=1;i=5047 ns=1;i=5049 Monitoring i=78 ns=2;i=1014 ns=1;i=1014 ns=1;i=5052 ns=1;i=5050 Process Entry point for process information of the MachineryItem. i=80 i=61 ns=1;i=5049 ns=1;i=6102 ns=1;i=6104 ns=1;i=6100 ns=1;i=6098 ns=1;i=6096 CoolingSystemPressureInlet i=80 i=17497 ns=1;i=5052 ns=1;i=6103 EngineeringUnits i=78 i=68 ns=1;i=6102 CoolingSystemPressureOutlet i=80 i=17497 ns=1;i=5052 ns=1;i=6105 EngineeringUnits i=78 i=68 ns=1;i=6104 CoolingSystemTemperatureInlet i=80 i=17497 ns=1;i=5052 ns=1;i=6101 EngineeringUnits i=78 i=68 ns=1;i=6100 CoolingSystemTemperatureOutlet i=80 i=17497 ns=1;i=5052 ns=1;i=6099 EngineeringUnits i=78 i=68 ns=1;i=6098 FlowRate i=80 i=17497 ns=1;i=5052 ns=1;i=6097 EngineeringUnits i=78 i=68 ns=1;i=6096 PlasmaGeneratorType PST PlasmaGeneratorType Basic PST PlasmaGeneratorType Advanced https://reference.opcfoundation.org/SurfaceTechnology/Plasma/v100/docs/7.4 i=58 ns=1;i=5030 ns=1;i=5032 ns=1;i=5031 Identification ns=2;i=1005 i=80 ns=1;i=1004 ns=1;i=6035 ns=1;i=6036 ns=1;i=5032 Manufacturer A human-readable, localized name of the manufacturer of the MachineryItem. i=68 i=78 ns=1;i=5030 SerialNumber A string containing a unique production number of the manufacturer of the MachineryItem. The global uniqueness of the serial number is only given in the context of the manufacturer, and potentially the model. The value shall not change during the life-cycle of the MachineryItem. i=68 i=78 ns=1;i=5030 MachineryBuildingBlocks i=78 i=61 ns=1;i=1004 ns=1;i=5030 ns=1;i=5031 Monitoring ns=2;i=1014 i=78 ns=1;i=1004 ns=1;i=5033 ns=1;i=5034 ns=1;i=5032 Process Entry point for process information of the MachineryItem. i=61 i=80 ns=1;i=5031 ns=1;i=6012 ns=1;i=6049 ns=1;i=6053 ns=1;i=6015 ns=1;i=6063 ns=1;i=6051 ns=1;i=6037 ns=1;i=6041 ns=1;i=6058 ns=1;i=6048 ns=1;i=6039 BiasArcCounter i=80 i=17497 ns=1;i=5033 ns=1;i=6013 EngineeringUnits i=78 i=68 ns=1;i=6012 BiasCurrent i=17497 i=80 ns=1;i=5033 ns=1;i=6050 EngineeringUnits i=68 i=78 ns=1;i=6049 BiasPower i=17497 i=80 ns=1;i=5033 ns=1;i=6054 EngineeringUnits i=68 i=78 ns=1;i=6053 BiasPulseFrequency i=80 i=17497 ns=1;i=5033 ns=1;i=6044 ns=1;i=6046 ns=1;i=6043 0 BiasDutyCycle i=80 i=17497 ns=1;i=6015 ns=1;i=6045 EngineeringUnits i=78 i=68 ns=1;i=6044 BiasPolarity i=80 i=68 ns=1;i=6015 EngineeringUnits i=78 i=68 ns=1;i=6015 BiasReversePower i=17497 i=80 ns=1;i=5033 ns=1;i=6064 EngineeringUnits i=68 i=78 ns=1;i=6063 BiasVoltage i=17497 i=80 ns=1;i=5033 ns=1;i=6052 EngineeringUnits i=68 i=78 ns=1;i=6051 EvaporatorCurrent i=17497 i=80 ns=1;i=5033 ns=1;i=6038 EngineeringUnits i=68 i=78 ns=1;i=6037 EvaporatorPower i=17497 i=80 ns=1;i=5033 ns=1;i=6042 EngineeringUnits i=68 i=78 ns=1;i=6041 EvaporatorPulseFrequency i=17497 i=80 ns=1;i=5033 ns=1;i=6059 ns=1;i=6060 ns=1;i=6047 0 EngineeringUnits i=68 i=78 ns=1;i=6058 EvaporatorDutyCycle i=17497 i=80 ns=1;i=6058 ns=1;i=6061 EngineeringUnits i=68 i=78 ns=1;i=6060 EvaporatorPolarity i=80 i=68 ns=1;i=6058 EvaporatorReversePower i=80 i=17497 ns=1;i=5033 ns=1;i=6062 EngineeringUnits i=78 i=68 ns=1;i=6048 EvaporatorVoltage i=17497 i=80 ns=1;i=5033 ns=1;i=6040 EngineeringUnits i=68 i=78 ns=1;i=6039 Status Entry point for status information of the MachineryItem. If this Object is provided, and the MachineryItemState is provided, it shall be referenced. If this Object is provided and the MachineryOperationMode is provided, it shall be referenced. i=61 i=80 ns=1;i=5031 ns=1;i=6055 ns=1;i=6014 ns=1;i=6057 ns=1;i=6056 BiasGeneratorSwitchOn i=68 i=80 ns=1;i=5034 EvaporatorGeneratorSwitchOn i=80 i=68 ns=1;i=5034 PlasmaActive i=68 i=80 ns=1;i=5034 PlasmaReadyToStart i=68 i=80 ns=1;i=5034 PlasmaJetType PST PlasmaJetType Basic PST PlasmaJetType Identification PST PlasmaJetType Advanced https://reference.opcfoundation.org/SurfaceTechnology/Plasma/v100/docs/7.12 i=58 ns=1;i=5066 ns=1;i=5070 ns=1;i=5067 Identification i=80 ns=2;i=1005 ns=1;i=1029 ns=1;i=6143 ns=1;i=6144 ns=1;i=5070 Manufacturer A human-readable, localized name of the manufacturer of the MachineryItem. i=78 i=68 ns=1;i=5066 SerialNumber A string containing a unique production number of the manufacturer of the MachineryItem. The global uniqueness of the serial number is only given in the context of the manufacturer, and potentially the model. The value shall not change during the life-cycle of the MachineryItem. i=78 i=68 ns=1;i=5066 MachineryBuildingBlocks i=78 i=61 ns=1;i=1029 ns=1;i=5066 ns=1;i=5067 Monitoring i=78 ns=2;i=1014 ns=1;i=1029 ns=1;i=5071 ns=1;i=5072 ns=1;i=5070 Process Entry point for process information of the MachineryItem. i=80 i=61 ns=1;i=5067 ns=1;i=6151 ns=1;i=6163 ns=1;i=6161 ns=1;i=6157 ns=1;i=6159 ns=1;i=6153 ns=1;i=6155 ns=1;i=6149 PlasmaCurrent i=17497 i=78 ns=1;i=5071 ns=1;i=6152 EngineeringUnits i=78 i=68 ns=1;i=6151 PlasmaCycleTime i=80 i=17497 ns=1;i=5071 ns=1;i=6164 EngineeringUnits i=78 i=68 ns=1;i=6163 PlasmaFrequency i=80 i=17497 ns=1;i=5071 ns=1;i=6162 EngineeringUnits i=78 i=68 ns=1;i=6161 PlasmaJetFlow i=80 i=17497 ns=1;i=5071 ns=1;i=6158 EngineeringUnits i=78 i=68 ns=1;i=6157 PlasmaJetPower i=80 i=17497 ns=1;i=5071 ns=1;i=6160 EngineeringUnits i=78 i=68 ns=1;i=6159 PlasmaJetPressure i=80 i=17497 ns=1;i=5071 ns=1;i=6154 EngineeringUnits i=78 i=68 ns=1;i=6153 PlasmaJetRotation i=80 i=17497 ns=1;i=5071 ns=1;i=6156 EngineeringUnits i=78 i=68 ns=1;i=6155 PlasmaVoltage i=78 i=17497 ns=1;i=5071 ns=1;i=6150 EngineeringUnits i=78 i=68 ns=1;i=6149 Status Entry point for status information of the MachineryItem. If this Object is provided, and the MachineryItemState is provided, it shall be referenced. If this Object is provided and the MachineryOperationMode is provided, it shall be referenced. i=80 i=61 ns=1;i=5067 ns=1;i=6165 TransformatorInformation i=78 i=68 ns=1;i=5072 PlasmaSurfaceMachineType PST PlasmaSurfaceMachineType Basic PST PlasmaSurfaceMachineType JobManagement PST PlasmaSurfaceMachineType OperationMode PST PlasmaSurfaceMachineType Advanced https://reference.opcfoundation.org/SurfaceTechnology/Plasma/v100/docs/7.1 i=58 ns=1;i=5003 ns=1;i=5002 ns=1;i=5007 ns=1;i=5010 ns=1;i=5004 Components ns=2;i=1006 i=78 ns=1;i=1003 ns=1;i=5013 ns=1;i=5014 ns=1;i=5011 ns=1;i=5012 ns=1;i=5010 <GasSystem> ns=1;i=1007 i=11510 ns=1;i=5003 ns=1;i=5073 ns=1;i=5074 ns=1;i=5075 Components ns=2;i=1006 i=78 ns=1;i=5013 ns=1;i=5074 MachineryBuildingBlocks i=61 i=78 ns=1;i=5013 ns=1;i=5073 ns=1;i=5075 Monitoring ns=2;i=1014 i=78 ns=1;i=5013 ns=1;i=5074 <PlantCoolingSystem> ns=1;i=1014 i=11508 ns=1;i=5003 ns=1;i=5076 ns=1;i=5077 ns=1;i=5078 Components ns=2;i=1006 i=78 ns=1;i=5014 ns=1;i=5104 ns=1;i=5077 <CirculationSystem> ns=1;i=1017 i=11508 ns=1;i=5076 MachineryBuildingBlocks i=61 i=78 ns=1;i=5014 ns=1;i=5076 ns=1;i=5078 Monitoring ns=2;i=1014 i=78 ns=1;i=5014 ns=1;i=5077 <PlasmaGenerator> ns=1;i=1004 i=11510 ns=1;i=5003 ns=1;i=5079 ns=1;i=5080 MachineryBuildingBlocks i=61 i=78 ns=1;i=5011 ns=1;i=5080 Monitoring ns=2;i=1014 i=78 ns=1;i=5011 ns=1;i=5079 <PrecursorSystem> ns=1;i=1005 i=11508 ns=1;i=5003 ns=1;i=5081 ns=1;i=5082 ns=1;i=5083 Components ns=2;i=1006 i=78 ns=1;i=5012 ns=1;i=5082 MachineryBuildingBlocks i=61 i=78 ns=1;i=5012 ns=1;i=5081 ns=1;i=5083 Monitoring ns=2;i=1014 i=78 ns=1;i=5012 ns=1;i=5082 Identification ns=2;i=1012 i=78 ns=1;i=1003 ns=1;i=6009 ns=1;i=6008 ns=1;i=6011 ns=1;i=5010 Manufacturer A human-readable, localized name of the manufacturer of the MachineryItem. i=68 i=78 ns=1;i=5002 ProductInstanceUri A globally unique resource identifier provided by the manufacturer of the machine i=68 i=78 ns=1;i=5002 SerialNumber A string containing a unique production number of the manufacturer of the MachineryItem. The global uniqueness of the serial number is only given in the context of the manufacturer, and potentially the model. The value shall not change during the life-cycle of the MachineryItem. i=68 i=78 ns=1;i=5002 JobManagement ns=4;i=1003 i=80 ns=1;i=1003 ns=1;i=5008 ns=1;i=5009 ns=1;i=5010 JobOrderControl ns=5;i=1002 i=78 ns=1;i=5007 ns=1;i=6016 ns=1;i=6018 ns=1;i=6019 ns=1;i=6020 ns=1;i=6021 ns=1;i=6022 ns=1;i=6023 ns=1;i=6024 ns=1;i=6025 CurrentState i=2760 i=78 ns=1;i=5008 ns=1;i=6017 Id i=68 i=78 ns=1;i=6016 EquipmentID Defines a read-only set of Equipment Class IDs and Equipment IDs that may be specified in a job order. i=63 i=78 ns=1;i=5008 JobOrderList Defines a read-only list of job order information available from the server. i=63 i=78 ns=1;i=5008 MaterialClassID Defines a read-only set of Material Classes IDs that may be specified in a job order. i=63 i=78 ns=1;i=5008 MaterialDefinitionID Defines a read-only set of Material Classes IDs that may be specified in a job order. i=63 i=78 ns=1;i=5008 MaxDownloadableJobOrders i=68 i=78 ns=1;i=5008 PersonnelID Defines a read-only set of Personnel IDs and Person IDs that may be specified in a job order. i=63 i=78 ns=1;i=5008 PhysicalAssetID Defines a read-only set of Physical Asset Class IDs and Physical Asset IDs that may be specified in a job order. i=63 i=78 ns=1;i=5008 WorkMaster Defines a read-only set of work master IDs that may be specified in a job order, and the read-only set of parameters that may be specified for a specific work master. i=63 i=78 ns=1;i=5008 JobOrderResults ns=5;i=1003 i=78 ns=1;i=5007 ns=1;i=7001 ns=1;i=7002 RequestJobResponseByJobOrderID i=78 ns=1;i=5009 ns=1;i=6026 ns=1;i=6027 InputArguments i=68 i=78 ns=1;i=7001 i=297 JobOrderID i=12 -1 Contains an ID of the job order, as specified by the method caller. OutputArguments i=68 i=78 ns=1;i=7001 i=297 JobResponse ns=5;i=3013 -1 Contains information about the execution of a job order, such as the current status of the job, actual material consumed, actual material produced, actual equipment used, and job specific data. i=297 ReturnStatus i=9 -1 Returns the status of the method execution. RequestJobResponseByJobOrderState i=78 ns=1;i=5009 ns=1;i=6028 ns=1;i=6029 InputArguments i=68 i=78 ns=1;i=7002 i=297 JobOrderState ns=5;i=3006 1 0 Contains a job status of the JobResponse to be returned. The array shall provide at least one entry representing the top level state and potentially additional entries representing substates. The first entry shall be the top level entry, having the BrowsePath set to null. The order of the substates is not defined. OutputArguments i=68 i=78 ns=1;i=7002 i=297 JobResponses ns=5;i=3013 1 0 Contains a list of information about the execution of a job order, such as the current status of the job, actual material consumed, actual material produced, actual equipment used, and job specific data. i=297 ReturnStatus i=9 -1 Returns the status of the method execution. MachineryBuildingBlocks i=61 i=78 ns=1;i=1003 ns=1;i=5003 ns=1;i=5002 ns=1;i=5007 ns=1;i=5004 Monitoring ns=2;i=1014 i=78 ns=1;i=1003 ns=1;i=5015 ns=1;i=5016 ns=1;i=5017 ns=1;i=5010 Consumption Entry point for consumption information of the MachineryItem. i=61 i=80 ns=1;i=5004 ns=1;i=6030 PowerConsumption i=17497 i=80 ns=1;i=5015 ns=1;i=6031 EngineeringUnits i=68 i=78 ns=1;i=6030 Process Entry point for process information of the MachineryItem. i=61 i=80 ns=1;i=5004 ns=1;i=6032 SubstrateTemperature i=17497 i=80 ns=1;i=5016 ns=1;i=6033 EngineeringUnits i=68 i=78 ns=1;i=6032 Status Entry point for status information of the MachineryItem. If this Object is provided, and the MachineryItemState is provided, it shall be referenced. If this Object is provided and the MachineryOperationMode is provided, it shall be referenced. i=61 i=80 ns=1;i=5004 ns=1;i=6034 MainSwitchOn i=78 i=68 ns=1;i=5017 AtmosphericPressurePlasmaSurfaceMachineType PST AtmosphericPressurePlasmaSurfaceMachineType Basic PST AtmosphericPressurePlasmaSurfaceMachineType StateMachine PST AtmosphericPressurePlasmaSurfaceMachineType Advanced https://reference.opcfoundation.org/SurfaceTechnology/Plasma/v100/docs/7.3.1 ns=1;i=1003 ns=1;i=5026 ns=1;i=5027 Components ns=2;i=1006 i=78 ns=1;i=1009 ns=1;i=5019 <PlasmaJet> ns=1;i=1029 i=11510 ns=1;i=5095 ns=1;i=5096 ns=1;i=5026 MachineryBuildingBlocks i=61 i=78 ns=1;i=5019 ns=1;i=5096 Monitoring ns=2;i=1014 i=78 ns=1;i=5019 ns=1;i=5095 Monitoring ns=2;i=1014 i=78 ns=1;i=1009 ns=1;i=5028 Status Entry point for status information of the MachineryItem. If this Object is provided, and the MachineryItemState is provided, it shall be referenced. If this Object is provided and the MachineryOperationMode is provided, it shall be referenced. i=61 i=80 ns=1;i=5027 ns=1;i=5029 MachineryItemState i=80 ns=1;i=1010 ns=1;i=5028 ns=1;i=5102 ns=1;i=6182 AtmosphericPressurePlasmaNotExecutingSubState i=78 ns=1;i=1016 ns=1;i=5029 ns=1;i=6180 CurrentState i=78 i=2760 ns=1;i=5102 ns=1;i=6181 Id i=78 i=68 ns=1;i=6180 CurrentState i=78 i=2760 ns=1;i=5029 ns=1;i=6183 Id i=78 i=68 ns=1;i=6182 LowPressurePlasmaSurfaceMachineType PST LowPressurePlasmaSurfaceMachineType Basic PST LowPressurePlasmaSurfaceMachineType StateMachine PST LowPressurePlasmaSurfaceMachineType HeatingSystem PST LowPressurePlasmaSurfaceMachineType WorkpieceMotionDevice PST LowPressurePlasmaSurfaceMachineType Advanced https://reference.opcfoundation.org/SurfaceTechnology/Plasma/v100/docs/7.2.1 ns=1;i=1003 ns=1;i=5018 ns=1;i=5020 Components ns=2;i=1006 i=78 ns=1;i=1006 ns=1;i=5022 ns=1;i=5021 ns=1;i=5023 <HeatingSystem> ns=1;i=1023 i=11508 ns=1;i=5018 ns=1;i=5084 ns=1;i=5085 MachineryBuildingBlocks i=61 i=78 ns=1;i=5022 ns=1;i=5085 Monitoring ns=2;i=1014 i=78 ns=1;i=5022 ns=1;i=5084 <ProcessingChamber> ns=1;i=1020 i=11510 ns=1;i=5018 ns=1;i=5086 ns=1;i=5087 MachineryBuildingBlocks i=61 i=78 ns=1;i=5021 ns=1;i=5087 Monitoring ns=2;i=1014 i=78 ns=1;i=5021 ns=1;i=5086 <WorkpieceMotionDevice> ns=1;i=1026 i=11508 ns=1;i=5018 ns=1;i=5088 ns=1;i=5089 MachineryBuildingBlocks i=61 i=78 ns=1;i=5023 ns=1;i=5089 Monitoring ns=2;i=1014 i=78 ns=1;i=5023 ns=1;i=5088 Monitoring ns=2;i=1014 i=78 ns=1;i=1006 ns=1;i=5024 Status Entry point for status information of the MachineryItem. If this Object is provided, and the MachineryItemState is provided, it shall be referenced. If this Object is provided and the MachineryOperationMode is provided, it shall be referenced. i=61 i=80 ns=1;i=5020 ns=1;i=5025 MachineryItemState i=80 ns=1;i=1008 ns=1;i=5024 ns=1;i=6186 ns=1;i=5103 CurrentState i=78 i=2760 ns=1;i=5025 ns=1;i=6187 Id i=78 i=68 ns=1;i=6186 LowPressurePlasmaNotExecutingSubState i=78 ns=1;i=1013 ns=1;i=5025 ns=1;i=6184 CurrentState i=78 i=2760 ns=1;i=5103 ns=1;i=6185 Id i=78 i=68 ns=1;i=6184 PrecursorSystemType PST PrecursorSystemType Basic PST PrecursorSystemType Advanced https://reference.opcfoundation.org/SurfaceTechnology/Plasma/v100/docs/7.5 i=58 ns=1;i=5036 ns=1;i=5035 ns=1;i=5038 ns=1;i=5037 Components i=78 ns=2;i=1006 ns=1;i=1005 ns=1;i=5040 ns=1;i=5038 <PrecursorRegulator> i=11508 ns=1;i=1011 ns=1;i=5036 Identification ns=2;i=1005 i=80 ns=1;i=1005 ns=1;i=6065 ns=1;i=6066 ns=1;i=5038 Manufacturer A human-readable, localized name of the manufacturer of the MachineryItem. i=68 i=78 ns=1;i=5035 SerialNumber A string containing a unique production number of the manufacturer of the MachineryItem. The global uniqueness of the serial number is only given in the context of the manufacturer, and potentially the model. The value shall not change during the life-cycle of the MachineryItem. i=68 i=78 ns=1;i=5035 MachineryBuildingBlocks i=78 i=61 ns=1;i=1005 ns=1;i=5036 ns=1;i=5035 ns=1;i=5037 Monitoring ns=2;i=1014 i=78 ns=1;i=1005 ns=1;i=5039 ns=1;i=5038 Process Entry point for process information of the MachineryItem. i=61 i=80 ns=1;i=5037 ns=1;i=6067 PrimaryPressureControl i=17497 i=80 ns=1;i=5039 ns=1;i=6068 EngineeringUnits i=68 i=78 ns=1;i=6067 ProcessingChamberType PST ProcessingChamberType Basic PST ProcessingChamberType Advanced https://reference.opcfoundation.org/SurfaceTechnology/Plasma/v100/docs/7.9 i=58 ns=1;i=5053 ns=1;i=5056 ns=1;i=5054 Identification i=80 ns=2;i=1005 ns=1;i=1020 ns=1;i=6110 ns=1;i=6111 ns=1;i=5056 Manufacturer A human-readable, localized name of the manufacturer of the MachineryItem. i=78 i=68 ns=1;i=5053 SerialNumber A string containing a unique production number of the manufacturer of the MachineryItem. The global uniqueness of the serial number is only given in the context of the manufacturer, and potentially the model. The value shall not change during the life-cycle of the MachineryItem. i=78 i=68 ns=1;i=5053 MachineryBuildingBlocks i=78 i=61 ns=1;i=1020 ns=1;i=5053 ns=1;i=5054 Monitoring i=78 ns=2;i=1014 ns=1;i=1020 ns=1;i=5057 ns=1;i=5056 Process Entry point for process information of the MachineryItem. i=80 i=61 ns=1;i=5054 ns=1;i=6112 ns=1;i=6114 ns=1;i=6116 ns=1;i=6118 ns=1;i=6120 ChamberPrePressure i=80 i=17497 ns=1;i=5057 ns=1;i=6113 EngineeringUnits i=78 i=68 ns=1;i=6112 ChamberPressure i=78 i=17497 ns=1;i=5057 ns=1;i=6115 EngineeringUnits i=78 i=68 ns=1;i=6114 ChamberTemperature i=80 i=17497 ns=1;i=5057 ns=1;i=6117 EngineeringUnits i=78 i=68 ns=1;i=6116 LeakRate i=80 i=17497 ns=1;i=5057 ns=1;i=6119 EngineeringUnits i=78 i=68 ns=1;i=6118 PumpDownTime i=80 i=68 ns=1;i=5057 RegulatorType https://reference.opcfoundation.org/SurfaceTechnology/Plasma/v100/docs/7.7 i=58 ns=1;i=6087 ns=1;i=6075 ns=1;i=6073 ns=1;i=6083 ns=1;i=6085 ns=1;i=6077 ns=1;i=6079 ns=1;i=6081 ns=1;i=6088 ns=1;i=6091 CorrectionFactor i=80 i=68 ns=1;i=1011 GasConsumption i=80 i=17497 ns=1;i=1011 ns=1;i=6076 EngineeringUnits i=78 i=68 ns=1;i=6075 GasFlow i=80 i=17497 ns=1;i=1011 ns=1;i=6074 EngineeringUnits i=78 i=68 ns=1;i=6073 HeaterTemperature i=80 i=17497 ns=1;i=1011 ns=1;i=6084 EngineeringUnits i=78 i=68 ns=1;i=6083 JetHeadTemperature i=80 i=17497 ns=1;i=1011 ns=1;i=6086 EngineeringUnits i=78 i=68 ns=1;i=6085 PrecursorMassFlow i=80 i=17497 ns=1;i=1011 ns=1;i=6078 EngineeringUnits i=78 i=68 ns=1;i=6077 PrecursorVolumeFlow i=80 i=17497 ns=1;i=1011 ns=1;i=6080 EngineeringUnits i=78 i=68 ns=1;i=6079 TFittingTemperature i=80 i=17497 ns=1;i=1011 ns=1;i=6082 EngineeringUnits i=78 i=68 ns=1;i=6081 TypeOfGas i=80 i=11238 ns=1;i=1011 ns=1;i=6089 ns=1;i=6090 EnumValues i=78 i=68 ns=1;i=6088 i=7616 0 Ar i=7616 1 N2 i=7616 2 CH4 i=7616 3 C2H2 i=7616 4 O2 i=7616 5 H2 ValueAsText i=78 i=68 ns=1;i=6088 TypeOfPrecursorFluid i=80 i=11238 ns=1;i=1011 ns=1;i=6092 ns=1;i=6093 EnumValues i=78 i=68 ns=1;i=6091 i=7616 0 Ar i=7616 1 N2 i=7616 2 CH4 i=7616 3 C2H2 i=7616 4 O2 i=7616 5 H2 ValueAsText i=78 i=68 ns=1;i=6091 AtmosphericPressurePlasmaNotExecutingSubState_StateMachineType https://reference.opcfoundation.org/SurfaceTechnology/Plasma/v100/docs/7.3.3 i=2771 ns=1;i=6173 ns=1;i=5100 ns=1;i=5099 ns=1;i=5097 ns=1;i=5098 DefaultInstanceBrowseName The default BrowseName for instances of the type i=68 ns=1;i=1016 0 AtmosphericPressurePlasmaNotExecutingSubState FromIdleToStandby Transition from state Idle to state Standby i=2310 ns=1;i=1016 ns=1;i=5097 ns=1;i=5098 ns=1;i=6177 TransitionNumber i=78 i=68 ns=1;i=5100 1 FromStandbyToIdle Transition from state Standby to state Idle i=2310 ns=1;i=1016 ns=1;i=5097 ns=1;i=5098 ns=1;i=6176 TransitionNumber i=78 i=68 ns=1;i=5099 0 Idle The machine is being prepared for the next run i=2307 ns=1;i=1016 ns=1;i=6174 ns=1;i=5099 ns=1;i=5100 StateNumber i=78 i=68 ns=1;i=5097 0 Standby The system is ready to start i=2307 ns=1;i=1016 ns=1;i=6175 ns=1;i=5099 ns=1;i=5100 StateNumber i=78 i=68 ns=1;i=5098 1 LowPressurePlasmaNotExecutingSubState_StateMachineType https://reference.opcfoundation.org/SurfaceTechnology/Plasma/v100/docs/7.2.3 i=2771 ns=1;i=6166 ns=1;i=5093 ns=1;i=5094 ns=1;i=5092 ns=1;i=5091 DefaultInstanceBrowseName The default BrowseName for instances of the type i=68 ns=1;i=1013 0 LowPressurePlasmaNotExecutingSubState FromStandbyToVented Transition from state Standby to state Vented i=2310 ns=1;i=1013 ns=1;i=5092 ns=1;i=6169 ns=1;i=5091 TransitionNumber i=68 i=78 ns=1;i=5093 0 FromVentedToStandby Transition from state Vented to state Standby i=2310 ns=1;i=1013 ns=1;i=5092 ns=1;i=6170 ns=1;i=5091 TransitionNumber i=68 i=78 ns=1;i=5094 1 Standby The vacuum chamber is evacuated and the system is ready to start i=2307 ns=1;i=1013 ns=1;i=6168 ns=1;i=5093 ns=1;i=5094 StateNumber i=68 i=78 ns=1;i=5092 1 Vented The machine is being prepared for the next run i=2307 ns=1;i=1013 ns=1;i=6167 ns=1;i=5093 ns=1;i=5094 StateNumber i=68 i=78 ns=1;i=5091 0 AtmosphericPressurePlasmaMachineryItemState_StateMachineType https://reference.opcfoundation.org/SurfaceTechnology/Plasma/v100/docs/7.3.2 ns=2;i=1002 ns=1;i=5101 AtmosphericPressurePlasmaNotExecutingSubState i=78 ns=1;i=1016 ns=1;i=1010 ns=1;i=6178 ns=2;i=5007 CurrentState i=78 i=2760 ns=1;i=5101 ns=1;i=6179 Id i=78 i=68 ns=1;i=6178 LowPressurePlasmaMachineryItemState_StateMachineType https://reference.opcfoundation.org/SurfaceTechnology/Plasma/v100/docs/7.2.2 ns=2;i=1002 ns=1;i=5090 LowPressurePlasmaNotExecutingSubState ns=1;i=1013 i=78 ns=1;i=1008 ns=1;i=6171 ns=2;i=5007 CurrentState i=2760 i=78 ns=1;i=5090 ns=1;i=6172 Id i=68 i=78 ns=1;i=6171 WorkpieceMotionDeviceType PST WorkpieceMotionDeviceType Basic PST WorkpieceMotionDeviceType Advanced https://reference.opcfoundation.org/SurfaceTechnology/Plasma/v100/docs/7.11 i=58 ns=1;i=5062 ns=1;i=5064 ns=1;i=5063 Identification i=80 ns=2;i=1005 ns=1;i=1026 ns=1;i=6131 ns=1;i=6132 ns=1;i=5064 Manufacturer A human-readable, localized name of the manufacturer of the MachineryItem. i=78 i=68 ns=1;i=5062 SerialNumber A string containing a unique production number of the manufacturer of the MachineryItem. The global uniqueness of the serial number is only given in the context of the manufacturer, and potentially the model. The value shall not change during the life-cycle of the MachineryItem. i=78 i=68 ns=1;i=5062 MachineryBuildingBlocks i=78 i=61 ns=1;i=1026 ns=1;i=5062 ns=1;i=5063 Monitoring i=78 ns=2;i=1014 ns=1;i=1026 ns=1;i=5065 ns=1;i=5064 Process Entry point for process information of the MachineryItem. i=80 i=61 ns=1;i=5063 ns=1;i=6136 ns=1;i=6133 ns=1;i=6138 RotationPosition i=80 i=17497 ns=1;i=5065 ns=1;i=6137 EngineeringUnits i=78 i=68 ns=1;i=6136 RotationSpeed i=80 i=17497 ns=1;i=5065 ns=1;i=6134 ns=1;i=6135 0 EngineeringUnits i=78 i=68 ns=1;i=6133 RotationDirection i=80 i=68 ns=1;i=6133 ZMotion i=80 i=63 ns=1;i=5065 ns=1;i=6141 ns=1;i=6139 false ZMotionPosition i=80 i=17497 ns=1;i=6138 ns=1;i=6142 EngineeringUnits i=78 i=68 ns=1;i=6141 ZMotionSpeed i=80 i=17497 ns=1;i=6138 ns=1;i=6140 EngineeringUnits i=78 i=68 ns=1;i=6139 http://opcfoundation.org/UA/SurfaceTechnology/Plasma/ https://reference.opcfoundation.org/SurfaceTechnology/Plasma/v100/docs/9.1 i=11616 i=11715 ns=1;i=6010 ns=1;i=6001 ns=1;i=6002 ns=1;i=6003 ns=1;i=6004 ns=1;i=6005 ns=1;i=6006 ns=1;i=6007 DefaultAccessRestrictions i=68 ns=1;i=5001 i=15704 i=15644 IsNamespaceSubset i=68 ns=1;i=5001 false NamespacePublicationDate i=68 ns=1;i=5001 2026-01-01T00:00:00Z NamespaceUri i=68 ns=1;i=5001 http://opcfoundation.org/UA/SurfaceTechnology/Plasma/ NamespaceVersion i=68 ns=1;i=5001 1.0.0 StaticNodeIdTypes i=68 ns=1;i=5001 0 StaticNumericNodeIdRange i=68 ns=1;i=5001 StaticStringNodeIdPattern i=68 ns=1;i=5001